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Numerical model of rf glow discharges
Abstract
Theoretical predictions are given of the spatiotemporal distribution of charged-particle densities and electric field in a radio-frequency glow discharge. The model is based on a numerical solution of the continuity equations for electrons, positive ions, and negative ions coupled with Poisson's equation. The influence of frequency and gas composition (electropositive versus electronegative gas) on the discharge properties is analyzed and compared (qualitatively) with experimental results. In the case of electronegative gas mixtures, and at low frequencies (of the order and less than the ion plasma frequency), the numerical model predicts the formation of double layers at the plasma-sheath boundaries, in agreement with recent experimental measurements based on spectroscopic plasma-diagnostic techniques.
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Cited by
Hagelaar, G. J. M., & Pitchford, L. C. (2005) · Plasma Sources Science and Technology · doi:10.1088/0963-0252/14/4/011 · Cited by 3,422
Vahedi, V., & Surendra, M. (1995) · Computer Physics Communications · doi:10.1016/0010-4655(94)00171-w · Cited by 1,065
Numerical model of an ac plasma display panel cell in neon-xenon mixtures
Meunier, J., Belenguer, P., & Boeuf, J. P. (1995) · Journal of Applied Physics · doi:10.1063/1.360684 · Cited by 309
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Metadata
- Authors
- Boeuf, J.-P.
- Venue
- Physical Review A
- Publisher
- American Physical Society (APS)
- Published
- 1987-09-01
- Volume
- 36
- Issue
- 6
- Pages
- 2782-2792
- ISSN
- 0556-2791 (ISSN-L)
- OpenAlex
- W2032477939
- Cited by
- 371
- References
- 0
- FWCI
- 22.50
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Numerical model of rf glow discharges. https://app.cochat.ai/papers/10.1103/physreva.36.2782
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- Boeuf, J.-P. (1987). Numerical model of rf glow discharges. Physical Review A. https://doi.org/10.1103/physreva.36.2782
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
