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Avalanche ionization and dielectric breakdown in silicon with ultrafast laser pulses
Abstract
Experimental evidence is presented demonstrating avalanche ionization as the dominant mechanism for dielectric breakdown in silicon with ultrafast laser pulses at above-gap photon energies. Data are presented for pulses between 80 fs and 9 ns at 786 nm and 1.06 \ensuremath{\mu}m. Associated electric fields range from 0.3 to 40 MV/cm. Avalanche ionization coefficients range from ${10}^{10}$ to ${10}^{14} {\mathrm{s}}^{\mathrm{\ensuremath{-}}1}$ and are discussed in relation to semiempirical dc ionization theory and recent ac Monte Carlo calculations. Correlation is obtained between electron collision times and associated ionization rates.
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Citations
Cited by
Noack, J., & Vogel, A. (1999) · IEEE Journal of Quantum Electronics · doi:10.1109/3.777215 · Cited by 618
The physics of ultra-short laser interaction with solids at non-relativistic intensities
Gamaly, E. G. (2011) · Physics Reports · doi:10.1016/j.physrep.2011.07.002 · Cited by 310
Wavelength scaling of silicon laser ablation in picosecond regime
Sikora, A., Grojo, D., & Sentis, M. (2017) · Journal of Applied Physics · doi:10.1063/1.4994307 · Cited by 44
Metadata
- Authors
- Pronko, P. P., VanRompay, P. A., Horvath, C., Loesel, F., Juhasz, T., Liu, X., & Mourou, G.
- Venue
- Physical Review B
- Publisher
- American Physical Society (APS)
- Published
- 1998-08-01
- Volume
- 58
- Issue
- 5
- Pages
- 2387-2390
- ISSN
- 0163-1829 (ISSN-L)
- 1095-3795
- OpenAlex
- W2004705091
- Cited by
- 175
- References
- 0
- FWCI
- 2.45
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Avalanche ionization and dielectric breakdown in silicon with ultrafast laser pulses. https://app.cochat.ai/papers/10.1103/physrevb.58.2387
- The paper
- Pronko, P. P., VanRompay, P. A., Horvath, C., Loesel, F., Juhasz, T., Liu, X., & Mourou, G. (1998). Avalanche ionization and dielectric breakdown in silicon with ultrafast laser pulses. Physical Review B. https://doi.org/10.1103/physrevb.58.2387
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
