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Cited by 274

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Cavity Optomechanics with Stoichiometric SiN Films

Open access
Wilson, D. J., Regal, C. A., Papp, S. B., Kimble, H. J.·2009·Physical Review Letters

Abstract

We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN films support mechanical modes with unprecedented products of mechanical quality factor Q(m) and frequency nu(m) reaching Q(m)nu(m) approximately or = 2 x 10(13) Hz. The SiN membranes exhibit a low optical absorption characterized by Im(n) < or approximately equal to 10(-5) at 935 nm, representing a 15 times reduction for SiN membranes. We have developed an apparatus to simultaneously cool the motion of multiple mechanical modes based on a short, high-finesse Fabry-Perot cavity and present initial cooling results along with future possibilities.

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Crossref · 10.1103/physrevlett.103.207204

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Metadata

Authors
Wilson, D. J., Regal, C. A., Papp, S. B., & Kimble, H. J.
Venue
Physical Review Letters
Published
2009-11-13
Volume
103
Issue
20
Pages
207204-207204
ISSN
  • 0031-9007 (ISSN-L)
  • 1079-7114
OpenAlex
W2031927469
Cited by
274
References
1
FWCI
10.97
Type
journal article
Language
en
Open access
green

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CoChat. (2026). Citation check: Cavity Optomechanics with Stoichiometric SiN Films. https://app.cochat.ai/papers/10.1103/physrevlett.103.207204
The paper
Wilson, D. J., Regal, C. A., Papp, S. B., & Kimble, H. J. (2009). Cavity Optomechanics with Stoichiometric SiN Films. Physical Review Letters. https://doi.org/10.1103/physrevlett.103.207204

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

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