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On-chip spiral inductors with patterned ground shields for Si-based RF ICs
Abstract
This paper presents a patterned ground shield inserted between an on-chip spiral inductor and silicon substrate. The patterned ground shield can be realized in standard silicon technologies without additional processing steps. The impacts of shield resistance and pattern on inductance, parasitic resistances and capacitances, and quality factor are studied extensively. Experimental results show that a polysilicon patterned ground shield achieves the most improvement. At 1-2 GHz, the addition of the shield increases the inductor quality factor up to 33% and reduces the substrate coupling between two adjacent inductors by as much as 25 dB. We also demonstrate that the quality factor of a 2-GHz LC tank can be nearly doubled with a shielded inductor.
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Cited by
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Hegazi, E., Sjoland, H., & Abidi, A. A. (2001) · IEEE Journal of Solid-State Circuits · doi:10.1109/4.972142 · Cited by 1,045
A low-power integrated circuit for a wireless 100-electrode neural recording system.
Harrison, R. R., Watkins, P. T., Kier, R. J., Lovejoy, R. O., Black, D. J., Greger, B., & Solzbacher, F. (2007) · IEEE Journal of Solid-State Circuits · doi:10.1109/jssc.2006.886567 · Cited by 782
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Harrison, R., Watkins, P., Kier, R., Lovejoy, R., Black, D., Normann, R., & Solzbacher, F. (2006) · 2006 IEEE International Solid State Circuits Conference - Digest of Technical Papers · doi:10.1109/isscc.2006.1696288 · Cited by 731
Doan, C. H., Emami, S., Niknejad, A. M., & Brodersen, R. W. (2005) · IEEE Journal of Solid-State Circuits · doi:10.1109/jssc.2004.837251 · Cited by 719
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Metadata
- Authors
- Yue, C. P., & Wong, S. S.
- Venue
- IEEE Journal of Solid-State Circuits
- Published
- 1998-05
- Volume
- 33
- Issue
- 5
- Pages
- 743-752
- ISSN
- 0018-9200 (ISSN-L)
- OpenAlex
- W2167004581
- Cited by
- 1,144
- References
- 0
- FWCI
- 30.15
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: On-chip spiral inductors with patterned ground shields for Si-based RF ICs. https://app.cochat.ai/papers/10.1109/4.668989
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- Yue, C. P., & Wong, S. S. (1998). On-chip spiral inductors with patterned ground shields for Si-based RF ICs. IEEE Journal of Solid-State Circuits. https://doi.org/10.1109/4.668989
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
