Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides
Abstract
We present a three-dimensional (3-D) analysis of scattering losses due to sidewall roughness in rectangular dielectric waveguides valid for any refractive-index contrast and field polarization. The analysis is based on the volume current method and uses array factors to introduce significant mathematical simplifications to better understand the influence of individual waveguide parameters on scattering losses. We show that the typical two-dimensional (2-D) analyses can substantially overestimate scattering losses in small waveguides and that scattering losses exhibit considerable polarization dependence. We produce scattering-loss estimates for a wide variety of waveguides and provide guidelines for design of waveguide cross sections that are less sensitive to sidewall roughness.
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SiN waveguides can have lower scattering losses from sidewall roughness than Si waveguides.
“Also, SiN waveguides can have lower scattering losses from sidewall roughness in comparison to Si waveguides [27,28].”
From Integrated 1 × 3 MEMS silicon nitride photonics switch (2022) · cites this paper as [27]
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- Authors
- Barwicz, T., & Haus, H. A.
- Affiliations
- Massachusetts Institute of Technology (US)
- ORCID
- Barwicz, T.
- Venue
- Journal of Lightwave Technology
- Published
- 2005-09
- Volume
- 23
- Issue
- 9
- Pages
- 2719-2732
- ISSN
- 0733-8724 (ISSN-L)
- OpenAlex
- W2123104153
- Cited by
- 237
- References
- 0
- Citations by year
- 2026: 10 · 2025: 12 · 2024: 18 · 2023: 10 · 2022: 14 · 2021: 14 · 2020: 10 · 2019: 16 · 2018: 7 · 2017: 13 · 2016: 12 · 2015: 12 · 2014: 17 · 2013: 12 · 2012: 11
- FWCI
- 6.33
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Lightwave Technology (publishedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Microwave Engineering and Waveguides
- Physical Sciences › Engineering › Biomedical Engineering › Plasmonic and Surface Plasmon Research
- Keywords
- sidewall roughness, scattering loss, dielectric waveguides, array factor, polarization dependence, refractive index contrast, three-dimensional analysis
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