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Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography
Abstract
We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.
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Cited by
Bogaerts, W., De Heyn, P., Van Vaerenbergh, T., De Vos, K., Kumar Selvaraja, S., Claes, T., Dumon, P., Bienstman, P., Van Thourhout, D., & Baets, R. (2012) · Laser & Photonics Reviews · doi:10.1002/lpor.201100017 · Cited by 2,643
Self-citationMicrometre-scale silicon electro-optic modulator
Xu, Q., Schmidt, B., Pradhan, S., & Lipson, M. (2005) · Nature · doi:10.1038/nature03569 · Cited by 2,386
Imaging topological edge states in silicon photonics
Hafezi, M., Mittal, S., Fan, J., Migdall, A., & Taylor, J. M. (2013) · Nature Photonics · doi:10.1038/nphoton.2013.274 · Cited by 1,715
Ultracompact optical buffers on a silicon chip
Xia, F., Sekaric, L., & Vlasov, Y. (2007) · Nature Photonics · doi:10.1038/nphoton.2006.42 · Cited by 1,123
Review of Silicon Photonics Technology and Platform Development
Siew, S. Y., Li, B., Gao, F., Zheng, H. Y., Zhang, W., Guo, P., Xie, S. W., Song, A., Dong, B., Luo, L. W., et al. (2021) · Journal of Lightwave Technology · doi:10.1109/jlt.2021.3066203 · Cited by 988
Metadata
- Authors
- Dumon, P., Bogaerts, W., Wiaux, V., Wouters, J., Beckx, S., Van Campenhout, J., Taillaert, D., Luyssaert, B., Bienstman, P., Van Thourhout, D., & Baets, R.
- Venue
- IEEE Photonics Technology Letters
- Published
- 2004-05
- Volume
- 16
- Issue
- 5
- Pages
- 1328-1330
- ISSN
- 1041-1135 (ISSN-L)
- OpenAlex
- W2135196653
- Cited by
- 433
- References
- 0
- FWCI
- 34.99
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography. https://app.cochat.ai/papers/10.1109/lpt.2004.826025
- The paper
- Dumon, P., Bogaerts, W., Wiaux, V., Wouters, J., Beckx, S., Van Campenhout, J., Taillaert, D., Luyssaert, B., Bienstman, P., Van Thourhout, D., & Baets, R. (2004). Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography. IEEE Photonics Technology Letters. https://doi.org/10.1109/lpt.2004.826025
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
