Fabrication of Transmission Color Filters Using Silicon Subwavelength Gratings on Quartz Substrates
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We investigate theoretically and experimentally transmission color filters using silicon subwavelength gratings on quartz substrates. Each grating area is 120 mum-square, which is suitable pixel size for displays and multichannel detectors. In the fabrication, electron beam lithography and fast atom beam etching are used. The grating periods are 400, 350, and 440 nm for the red, green, and blue filters, respectively. The transmission spectrum obtained from a coupling between an incident light and the submicrometer periodic grating matches with human color perception. The transmittances of 71.1%, 58.1%, and 59.3% are obtained for the red, green, and blue filters, respectively
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Kanamori and coworkers report good transmission efficiency for RGB filters using silicon gratings, but the polarisation sensitivity of this structure is a limiting factor and they have not considered the absorptive silicon back-plane.
“Kanamori and coworkers [25] report good transmission efficiency for RGB filters using silicon gratings, but the polarisation sensitivity of this structure is a limiting factor. Additionally, they have not considered the absorptive silicon back-plane.”
From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [25]
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Waveguide sub‐wavelength structures: a review of principles and applications
Halir, R., Bock, P. J., Cheben, P., Ortega‐Moñux, A., Alonso‐Ramos, C., Schmid, J. H., Lapointe, J., Xu, D., Wangüemert‐Pérez, J. G., Molina‐Fernández, Í., et al. (2015) · Laser & Photonics Reviews · doi:10.1002/lpor.201400083 · Cited by 658 · see citing works
Robust inverse design of all-dielectric metasurface transmission-mode color filters
Panda, S. S., Vyas, H. S., & Hegde, R. S. (2020) · Optical Materials Express · doi:10.1364/ome.409186 · Cited by 33 · see citing works
- Authors
- Kanamori, Y., Shimono, M., & Hane, K.
- Affiliations
- Tohoku University (JP)
- ORCID
- Venue
- IEEE Photonics Technology Letters
- Published
- 2006-10
- Volume
- 18
- Issue
- 20
- Pages
- 2126-2128
- ISSN
- 1041-1135 (ISSN-L)
- OpenAlex
- W2157093292
- Cited by
- 179
- References
- 0
- Citations by year
- 2026: 3 · 2025: 4 · 2024: 3 · 2023: 5 · 2022: 2 · 2021: 6 · 2020: 12 · 2019: 11 · 2018: 15 · 2017: 12 · 2016: 16 · 2015: 14 · 2014: 15 · 2013: 19 · 2012: 14
- FWCI
- 2.55
- Type
- journal article
- Language
- en
- Open access
- Locations
- IEEE Photonics Technology Letters (publishedVersion)
- Institutional Repositories DataBase (IRDB) (submittedVersion)
- Institutional Repositories DataBase (IRDB) (submittedVersion, cc-by-nc-nd)
- Topics
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photonic Crystals and Applications
- Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Metamaterials and Metasurfaces Applications
- Keywords
- quartz substrate, grating couplers, electron beam lithography, optical transmittance, human color perception, multichannel detector
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