Cited by 47Photonic and Optical DevicesAdvanced MEMS and NEMS TechnologiesAdvanced Fiber Optic Sensors

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Cost-Effective $2\times 2$ Silicon Nitride Mach-Zehnder Interferometric (MZI) Thermo-Optic Switch

Joo, Jiho, Park, Jaegyu, Kim, Gyungock·2018·IEEE Photonics Technology Letters

Abstract

We present cost effective 2 x 2 silicon nitride Mach-Zehnder interferometric thermo-optic switches with 1 mm-length phase shifter. Devices were fabricated on a bulk silicon wafer with CMOS compatible process. The footprint was ~0.7 mm2. For the device designed for λ~1310 nm, we demonstrated ~26.8-dB crosstalk, 0.23-dB insertion loss, and 17.25-μs switching speed at λ~1325.8 nm. Similarly, λ~1550 nm device showed the ~24.7-dB crosstalk, 0.48-dB insertion loss, and 17.48-μs switching speed at λ~1550.8 nm. The measured operating power was 55.6 and 64.4 mW at λ~1325.8 nm and λ~1550.8 nm, respectively.

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    “The insertion loss, which is influenced by the propagation loss, is relatively high compared to other studies [18], [24].”
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Metadata

Authors
Joo, J., Park, J., & Kim, G.
Affiliations
Electronics and Telecommunications Research Institute (KR)
Venue
IEEE Photonics Technology Letters
Published
2018-04-15
Volume
30
Issue
8
Pages
740-743
ISSN
  • 1041-1135 (ISSN-L)
  • 1941-0174
OpenAlex
W2794050501
Cited by
47
References
1
Citations by year
2026: 11 · 2025: 5 · 2024: 4 · 2023: 5 · 2022: 6 · 2021: 3 · 2020: 5 · 2019: 6 · 2018: 2
FWCI
1.53
Type
journal article
Language
en
Open access
closed
Locations
IEEE Photonics Technology Letters (publishedVersion)
Funders
National Research Council of Science and Technology and the Ministry of Science and ICT, South Korea (CAP-15-05-ETRI)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Fiber Optic Sensors
Keywords
silicon nitride, Mach-Zehnder interferometer, thermo-optic switch, 2x2 optical switch, phase shifters, crosstalk, insertion loss, switching speed, CMOS-compatible fabrication, silicon-on-silicon, 1310 nm, 1550 nm

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