A Bistable Silicon Photonic Mems Phase Switch For Nonvolatile Photonic Circuits

Edinger, Pierre; Takabayashi, Alain Yuji; Errando-Herranz, Carlos; Khan, Umar; Antony, Cleitus; Talli, Giuseppe; Verheyen, Peter; Bogaerts, Wim; Quack, Niels; Gylfason, Kristinn B.

doi:10.1109/mems51670.2022.9699739

A Bistable Silicon Photonic Mems Phase Switch For Nonvolatile Photonic Circuits

Edinger, Pierre, Takabayashi, Alain Yuji, Errando-Herranz, Carlos · 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) · 2022