Toward Deterministic Material Removal and Surface Figure During Fused Silica Pad Polishing
Abstract
The material removal and surface figure after ceria pad polishing of fused silica glass have been measured and analyzed as a function of kinematics, loading conditions, and polishing time. Also, the friction at the workpiece/lap interface, the slope of the workpiece relative to the lap plane, and lap viscoelastic properties have been measured and correlated to material removal. The results show that the relative velocity between the workpiece and the lap (i.e., the kinematics) and the pressure distribution determine the spatial and temporal material removal, and hence the final surface figure of the workpiece. In cases where the applied loading and relative velocity distribution over the workpiece are spatially uniform, a significant nonuniformity in material removal, and thus surface figure, is observed. This is due to a nonuniform pressure distribution resulting from: (1) a moment caused by a pivot point and interface friction forces; (2) viscoelastic relaxation of the polyurethane lap; and (3) a physical workpiece/lap interface mismatch. Both the kinematics and these nonuniformities in the pressure distribution are quantitatively described, and have been combined to develop a spatial and temporal model, based on Preston's equation, called Surface Figure or SurF. The surface figure simulations are consistent with the experiment for a wide variety of polishing conditions. This study is an important step toward deterministic full‐aperture polishing, allowing optical glass fabrication to be performed in a more repeatable, less iterative, and hence more economical manner.
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The smoothing mechanism is based on the workpiece-lap (or workpiece-tool) mismatch and the convergence concept, where greater pressure (and hence material removal) occurs at the taller surface height locations on the workpiece relative to the lower surface height locations, resulting in a reduction of overall height variations with polishing.
“The smoothing mechanism is based on the workpiece-lap (or workpiece-tool) mismatch and the convergence concept, where greater pressure (and hence material removal) occurs at the taller surface height locations on the workpiece relative to the lower surface height locations resulting in a reduction of overall height variations with polishing[21-24].”
From Smoothing tool design and performance during subaperture glass polishing (2023) · cites this paper as [21]
The relative pressure distribution (σr) can be described in terms of the physical height mismatch between the workpiece and the tool at initial contact, referred to as the workpiece-tool mismatch or gap (∆hoL).
“The relative pressure distribution ( σ r ) can be described in terms of the physical height mismatch between the workpiece and the tool at initial contact, referred to as the workpiece-tool mismatch or gap ( ∆ hoL )[21].”
From Smoothing tool design and performance during subaperture glass polishing (2023) · cites this paper as [21]
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Smoothing tool design and performance during subaperture glass polishing
Suratwala, T., Tham, G., Steele, R., Wong, L., Menapace, J., Ray, N., & Bauman, B. (2023) · Applied Optics · doi:10.1364/ao.482739 · Cited by 11 · see citing works
Self-citation
- Authors
- Suratwala, T. I., Feit, M. D., & Steele, W. A.
- Affiliations
- Lawrence Livermore National Laboratory (US)
- Corresponding author
- Suratwala, Tayyab I.
- ORCID
- Suratwala, Tayyab I.
- Venue
- Journal of the American Ceramic Society
- Publisher
- Wiley
- Published
- 2010-04-26
- Volume
- 93
- Issue
- 5
- Pages
- 1326-1340
- ISSN
- 0002-7820 (ISSN-L)
- 1551-2916
- OpenAlex
- W2167078872
- Cited by
- 91
- References
- 0
- Citations by year
- 2026: 4 · 2025: 4 · 2024: 4 · 2023: 7 · 2022: 5 · 2021: 8 · 2020: 6 · 2019: 7 · 2018: 12 · 2017: 7 · 2016: 7 · 2015: 6 · 2014: 3 · 2013: 3 · 2012: 6
- FWCI
- 2.08
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of the American Ceramic Society (publishedVersion)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Surface Polishing Techniques
- Physical Sciences › Engineering › Computational Mechanics › Surface Roughness and Optical Measurements
- Physical Sciences › Engineering › Computational Mechanics › Laser Material Processing Techniques
- Keywords
- fused silica, material removal, surface figure, pressure distribution, Preston equation, deterministic polishing
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