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The Growth of a GaAs–GaAlAs Superlattice
Abstract
An ultra high vacuum epitaxy system is described, including special features such as computer control. The system is capable of preparing sophisticated structures requiring a high degree of precise control. GaAlAs films have been grown and evaluated by various techniques; He-ion backscattering and Raman spectroscopy have been shown to be particularly valuable for periodic structures. A structure with a very narrow period has been made, and its transport properties measured and interpreted by the superlattice mechanism.
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Citations
Cited by
Tunneling in a finite superlattice
Tsu, R., & Esaki, L. (1973) · Applied Physics Letters · doi:10.1063/1.1654509 · Cited by 2,371
Self-citationElectronic structure of quantum dots
Reimann, S. M., & Manninen, M. (2002) · Reviews of Modern Physics · doi:10.1103/revmodphys.74.1283 · Cited by 1,380
Compositional and doping superlattices in III-V semiconductors
Ploog, K., & Döhler, G. H. (1983) · Advances in Physics · doi:10.1080/00018738300101561 · Cited by 288
Study of zone-folding effects on phonons in alternating monolayers of GaAs-AlAs
Barker, A. S., Merz, J. L., & Gossard, A. C. (1978) · Physical Review B · doi:10.1103/physrevb.17.3181 · Cited by 279
Metadata
- Authors
- Chang, L. L., Esaki, L., Howard, W. E., & Ludeke, R.
- Venue
- Journal of Vacuum Science and Technology
- Publisher
- American Vacuum Society
- Published
- 1973-01-01
- Volume
- 10
- Issue
- 1
- Pages
- 11-16
- ISSN
- 0022-5355 (ISSN-L)
- OpenAlex
- W2000124823
- Cited by
- 167
- References
- 0
- FWCI
- 5.94
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: The Growth of a GaAs–GaAlAs Superlattice. https://app.cochat.ai/papers/10.1116/1.1317919
- The paper
- Chang, L. L., Esaki, L., Howard, W. E., & Ludeke, R. (1973). The Growth of a GaAs–GaAlAs Superlattice. Journal of Vacuum Science and Technology. https://doi.org/10.1116/1.1317919
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
