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Cited by 309

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Nucleation theory and the early stages of thin film growth

Ratsch, C., Venables, J. A.·2003·Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Abstract

A review is given of nucleation and growth models as applied to the earliest stages of thin film growth. Rate equations, kinetic Monte Carlo, and level set simulations are described in some detail, with discussion of remaining uncertainties, in particular the functional form of the so-called capture numbers in rate equations. Recent examples are given of sub-monolayer nucleation at surface defects, attachment-limited capture, and Ostwald ripening. The experimental literature is cited, and experiment–theory comparisons are made where possible. Emphasis is given to fast computational models that can span a large range of length and time scales, which might be further developed in the direction of on-line process control.

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Metadata

Authors
Ratsch, C., & Venables, J. A.
Venue
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Published
2003-09-01
Volume
21
Issue
5
Pages
S96-S109
ISSN
  • 0734-2101 (ISSN-L)
  • 1520-8559
OpenAlex
W2064671408
Cited by
309
References
1
FWCI
12.48
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Nucleation theory and the early stages of thin film growth. https://app.cochat.ai/papers/10.1116/1.1600454
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Ratsch, C., & Venables, J. A. (2003). Nucleation theory and the early stages of thin film growth. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. https://doi.org/10.1116/1.1600454

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.