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Nanofabrication by scanning probe microscope lithography: A review
Abstract
In addition to its well-known capabilities in imaging and spectroscopy, scanning probe microscopy (SPM) has recently shown great potentials for patterning of material structures in nanoscales. It has drawn the attention of not only the scientific community, but also the industry. This article examines various applications of SPM in modification, deposition, removal, and manipulation of materials for nanoscale fabrication. The SPM-based nanofabrication involves two basic technologies: scanning tunneling microscopy and atomic force microscopy. Major techniques related to these two technologies are evaluated with emphasis on their abilities, efficiencies, and reliabilities to make nanostructures. The principle and specific approach underlying each technique are presented; the differences and uniqueness among these techniques are subsequently discussed. Finally, concluding remarks are provided where the strength and weakness of the techniques studied are summarized and the scopes for technology improvement and future research are recommended.
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Citations
Cites
Positioning single atoms with a scanning tunnelling microscope
Eigler, D. M., & Schweizer, E. K. (1990) · Nature · doi:10.1038/344524a0 · Cited by 3,161
Cited by
Geim, A. K., & Novoselov, K. S. (2007) · Nature Materials · doi:10.1038/nmat1849 · Cited by 39,979
Tailoring the atomic structure of graphene nanoribbons by scanning tunnelling microscope lithography
Tapasztó, L., Dobrik, G., Lambin, P., & Biró, L. P. (2008) · Nature Nanotechnology · doi:10.1038/nnano.2008.149 · Cited by 962
Applications of dip-pen nanolithography
Salaita, K., Wang, Y., & Mirkin, C. A. (2007) · Nature Nanotechnology · doi:10.1038/nnano.2007.39 · Cited by 845
Kim, F. S., Ren, G., & Jenekhe, S. A. (2011) · Chemistry of Materials · doi:10.1021/cm102772x · Cited by 664
Electrospinning materials for energy-related applications and devices
Dong, Z., Kennedy, S. J., & Wu, Y. (2011) · Journal of Power Sources · doi:10.1016/j.jpowsour.2011.01.090 · Cited by 437
Metadata
- Authors
- Tseng, A. A., Notargiacomo, A., & Chen, T. P.
- Venue
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Publisher
- American Vacuum Society
- Published
- 2005-05-01
- Volume
- 23
- Issue
- 3
- Pages
- 877-894
- ISSN
- 1071-1023 (ISSN-L)
- 1520-8567
- OpenAlex
- W2037012265
- Cited by
- 446
- References
- 1
- FWCI
- 16.62
- Type
- journal article
- Language
- en
- Open access
- closed
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- Tseng, A. A., Notargiacomo, A., & Chen, T. P. (2005). Nanofabrication by scanning probe microscope lithography: A review. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. https://doi.org/10.1116/1.1926293
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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