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Submicroscopic pattern replication with visible light
Abstract
Contact imaging with visible light is possible at submicroscopic resolution because the near field of a radiating object contains information of sufficiently high resolution. In this paper we demonstrate this principle by contact imaging of planar submicroscopic metal patterns with blue light (400 nm). Experimental details are described for two experiments: (1) The shadow of an opaque pattern was recorded on a negative photoresist and developed using permanganate staining. (2) An image of a transparent metal pattern was imprinted onto a molecular dye layer, exploiting the fact that photochemical bleaching of the dye is inhibited by contact with the metal due to energy transfer. Development was by silver decoration. The resolution obtained was 100 nm with the photoresist, and 50 to 70 nm with the dye layer.
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Cited by
Unconventional Methods for Fabricating and Patterning Nanostructures
Xia, Y., Rogers, J. A., Paul, K. E., & Whitesides, G. M. (1999) · Chemical Reviews · doi:10.1021/cr980002q · Cited by 1,538
Zhang, J., Li, Y., Zhang, X., & Yang, B. (2010) · Advanced Materials · doi:10.1002/adma.201000755 · Cited by 649
Magnetic multilayers on nanospheres
Albrecht, M., Hu, G., Guhr, I. L., Ulbrich, T. C., Boneberg, J., Leiderer, P., & Schatz, G. (2005) · Nature Materials · doi:10.1038/nmat1324 · Cited by 355
Ordered Arrays of Silicon Nanowires Produced by Nanosphere Lithography and Molecular Beam Epitaxy
Fuhrmann, B., Leipner, H. S., Höche, H.-R., Schubert, L., Werner, P., & Gösele, U. (2005) · Nano Letters · doi:10.1021/nl051856a · Cited by 286
Haynes, C. L., McFarland, A. D., Smith, M. T., Hulteen, J. C., & Van Duyne, R. P. (2002) · The Journal of Physical Chemistry B · doi:10.1021/jp013570+ · Cited by 276
Metadata
- Authors
- Fischer, U. C., & Zingsheim, H. P.
- Venue
- Journal of Vacuum Science and Technology
- Publisher
- American Vacuum Society
- Published
- 1981-11-01
- Volume
- 19
- Issue
- 4
- Pages
- 881-885
- ISSN
- 0022-5355 (ISSN-L)
- OpenAlex
- W2046895154
- Cited by
- 418
- References
- 0
- FWCI
- 0.53
- Type
- journal article
- Language
- en
- Open access
- closed
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- Fischer, U. C., & Zingsheim, H. P. (1981). Submicroscopic pattern replication with visible light. Journal of Vacuum Science and Technology. https://doi.org/10.1116/1.571227
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Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
