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Revised structure zone model for thin film physical structure
Abstract
Thin films prepared under conditions of low adatom mobility are characterized by a highly anisotropic physical structure with a wide range of systematically varying column and void sizes. The structure zone models, previously developed to classify the larger sized physical structures, are revised to account for the evolutionary growth stages of structure development as well as the separate effects of thermal- and bombardment-induced mobility. The zone T introduced by Thornton is shown to be a subzone within zone 1.
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Citations
Cited by
Optical Properties and Microstructure of Plasma Deposited Ta2O5 and Nb2O5 Films
Szymanowski, H., Zabeida, O., Klemberg-Sapieha, J. E., & Martinu, L. (2005) · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · doi:10.1116/1.1851544 · Cited by 83
Thermal properties of a tetrahedrally bonded amorphous solid:CdGeAs2
Cahill, D. G., & Pohl, R. O. (1988) · Physical Review B · doi:10.1103/physrevb.37.8773 · Cited by 52
Metadata
- Authors
- Messier, R., Giri, A. P., & Roy, R. A.
- Venue
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- Publisher
- American Vacuum Society
- Published
- 1984-04-01
- Volume
- 2
- Issue
- 2
- Pages
- 500-503
- ISSN
- 0734-2101 (ISSN-L)
- 1520-8559
- OpenAlex
- W2011044189
- Cited by
- 968
- References
- 0
- FWCI
- 10.79
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Revised structure zone model for thin film physical structure. https://app.cochat.ai/papers/10.1116/1.572604
- The paper
- Messier, R., Giri, A. P., & Roy, R. A. (1984). Revised structure zone model for thin film physical structure. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. https://doi.org/10.1116/1.572604
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
