Effect of the tool influence function shape of the semirigid bonnet to the tool path ripple error
Abstract
To suppress the medium-high spatial frequency, error on optical surfaces is still a challenging work to date, and the tool path ripple (TPR) error is the main reason for these errors. With this in view, the effect of the tool influence function (TIF) shape of the semirigid (SR) bonnet to the TPR error is analyzed. The SR bonnet is a recently developed bonnet tool for high efficiency polishing. This tool can generate three kinds of TIF including Gaussian-like shape, trapezoidal shape, and “M” shape. Experimental studies have been conducted to analyze their effect to the root mean square/peak-to-valley value of the TPR error, and discussions have been made on those results. It is found that different shapes of TIF can be implemented through controlling its inflated pressure. The Gaussian-like shape has the highest probability to generate lower TPR error than the trapezoidal shape and “M” shape TIFs, which have been proven by the verification experiments.
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The general approach to minimizing MSF errors in the final workpiece during fabrication is to develop processes that minimize the creation of MSF errors during surface figure correction and/or to reduce MSF errors post surface figure correction using a smoothing polishing process.
“The general approach to minimizing MRF errors in the final workpiece during fabrication is to: 1) develop processes that minimize the creation of MSF errors during surface figure correction (such as optimized rastering patterns[12-14], tool size selection, and tool process parameters[15, 16]); and/or 2) reduce MSF errors post surface figure correction using a smoothing polishing process[17-20].”
From Smoothing tool design and performance during subaperture glass polishing (2023) · cites this paper as [15]
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Smoothing tool design and performance during subaperture glass polishing
Suratwala, T., Tham, G., Steele, R., Wong, L., Menapace, J., Ray, N., & Bauman, B. (2023) · Applied Optics · doi:10.1364/ao.482739 · Cited by 11 · see citing works
- Authors
- Lin, J., Wang, C., Ye, H., Yang, W., & Guo, Y.
- Affiliations
- Xiamen University (CN)
- Venue
- Optical Engineering
- Publisher
- SPIE-Intl Soc Optical Eng
- Published
- 2015-11-03
- Volume
- 54
- Issue
- 11
- Pages
- 1-7
- ISSN
- 0091-3286 (ISSN-L)
- 1560-2303
- OpenAlex
- W1917342044
- Cited by
- 11
- References
- 0
- Citations by year
- 2025: 1 · 2024: 3 · 2023: 2 · 2022: 3 · 2020: 1 · 2017: 1
- FWCI
- 0.17
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Optical Engineering (publishedVersion)
- Funders
- Natural Science Foundation of China (51275433)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Surface Polishing Techniques
- Physical Sciences › Engineering › Biomedical Engineering › Advanced optical system design
- Physical Sciences › Engineering › Computational Mechanics › Surface Roughness and Optical Measurements
- Keywords
- tool influence function, optical surface polishing, peak-to-valley error, root mean square error
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