Fabrication of SiC aspheric mirrors with low mid-spatial error
Abstract
Recent experience with finishing off-axis parabolas and other conic surfaces is demonstrated by some examples that illustrate surface accuracy – not only in terms of traditional metrics, but also in terms of specified ranges of spatial frequency. Particular attention is given to the topic of interferometric metrology, and the extent to which we can effectively characterize mid-spatial frequency errors. The presence of mid-spatial errors can appear even more dominant in hard ceramics like SiC as compared with glass – reasons for this are suggested. This paper will discuss how controlled force grinding, robotic polishing, and surface smoothing can be employed to minimize and mitigate mid-spatial errors in fast silicon carbide aspheric mirrors. Recent experience and results are presented on two SiC mirrors finished by Aperture Optical Sciences Inc.
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Machine vibrations or non-smooth movements of the stage can cause MSF errors.
“or by various machine vibrations or non-smooth movements of the stage[4, 5].”
From Smoothing tool design and performance during subaperture glass polishing (2023) · cites this paper as [4]
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Smoothing tool design and performance during subaperture glass polishing
Suratwala, T., Tham, G., Steele, R., Wong, L., Menapace, J., Ray, N., & Bauman, B. (2023) · Applied Optics · doi:10.1364/ao.482739 · Cited by 11 · see citing works
- Authors
- Tinker, F., & Xin, K.
- Venue
- SPIE Proceedings
- Publisher
- SPIE
- Published
- 2013-09-30
- Volume
- 8837
- Pages
- 88370M
- ISSN
- 0277-786X (ISSN-L)
- OpenAlex
- W2076066905
- Cited by
- 9
- References
- 0
- Citations by year
- 2023: 1 · 2021: 3 · 2019: 1 · 2017: 1 · 2016: 2 · 2014: 1
- FWCI
- 1.98
- Type
- conference paper
- Language
- en
- Open access
- closed
- Locations
- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (publishedVersion)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Surface Polishing Techniques
- Physical Sciences › Engineering › Computational Mechanics › Surface Roughness and Optical Measurements
- Physical Sciences › Engineering › Biomedical Engineering › Advanced optical system design
- Keywords
- silicon carbide, aspheric mirrors, mid-spatial frequency error, interferometric metrology, surface accuracy, robotic polishing, surface smoothing, hard ceramics, space optics
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