Combined fabrication process for high-precision aspheric surface based on smoothing polishing and magnetorheological finishing
Abstract
Due to the different curvature everywhere, the aspheric surface is hard to achieve high-precision accuracy by the traditional polishing process. Controlling of the mid-spatial frequency errors (MSFR), in particular, is almost unapproachable. In this paper, the combined fabrication process based on the smoothing polishing (SP) and magnetorheological finishing (MRF) is proposed. The pressure distribution of the rigid polishing lap and semi-flexible polishing lap is calculated. The shape preserving capacity and smoothing effect are compared. The feasibility of smoothing aspheric surface with the semi-flexible polishing lap is verified, and the key technologies in the SP process are discussed. Then, A K4 parabolic surface with the diameter of 500mm is fabricated based on the combined fabrication process. A Φ150 mm semi-flexible lap is used in the SP process to control the MSFR, and the deterministic MRF process is applied to figure the surface error. The root mean square (RMS) error of the aspheric surface converges from 0.083λ (λ=632.8 nm) to 0.008λ. The power spectral density (PSD) result shows that the MSFR are well restrained while the surface error has a great convergence.
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The general approach to minimizing MSF errors in the final workpiece during fabrication is to develop processes that minimize the creation of MSF errors during surface figure correction and/or to reduce MSF errors post surface figure correction using a smoothing polishing process.
“The general approach to minimizing MRF errors in the final workpiece during fabrication is to: 1) develop processes that minimize the creation of MSF errors during surface figure correction (such as optimized rastering patterns[12-14], tool size selection, and tool process parameters[15, 16]); and/or 2) reduce MSF errors post surface figure correction using a smoothing polishing process[17-20].”
From Smoothing tool design and performance during subaperture glass polishing (2023) · cites this paper as [19]
Various tool types have been developed including multilayer elastic tools, viscoelastic tools (like Newtonian fluids), semi-flexible tools (e.g. thin metal layer), viscoplastic (pitch) tools, and mechanically driven tools.
“Various tool types have been developed including multilayer elastic tools, viscoelastic tools (like Newtonian fluids) [18, 30, 31], semi-flexible tools (e.g. thin metal layer) [17, 19, 20], viscoplastic (pitch) tools [19, 27, 28, 32], and mechanically driven tools[33].”
From Smoothing tool design and performance during subaperture glass polishing (2023) · cites this paper as [19]
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Smoothing tool design and performance during subaperture glass polishing
Suratwala, T., Tham, G., Steele, R., Wong, L., Menapace, J., Ray, N., & Bauman, B. (2023) · Applied Optics · doi:10.1364/ao.482739 · Cited by 11 · see citing works
- Authors
- Nie, X., Li, S., Song, C., & Hu, H.
- Affiliations
- National University of Defense Technology (CN)
- Venue
- SPIE Proceedings
- Publisher
- SPIE
- Published
- 2014-08-06
- Volume
- 9281
- Pages
- 928111
- ISSN
- 0277-786X (ISSN-L)
- OpenAlex
- W2015627694
- Cited by
- 6
- References
- 0
- Citations by year
- 2026: 1 · 2023: 1 · 2019: 2 · 2017: 1 · 2015: 1
- FWCI
- 1.29
- Type
- conference paper
- Language
- en
- Open access
- closed
- Locations
- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (publishedVersion)
- Funders
- National Natural Science Foundation of China
- National Key Research and Development Program of China
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Surface Polishing Techniques
- Physical Sciences › Engineering › Computational Mechanics › Surface Roughness and Optical Measurements
- Physical Sciences › Engineering › Biomedical Engineering › Advanced optical system design
- Keywords
- magnetorheological finishing, mid-spatial frequency error, shape preservation, power spectral density
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