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Submicrometer Patterning of Charge in Thin-Film Electrets
Abstract
Thin-film electrets have been patterned with trapped charge with submicrometer resolution using a flexible, electrically conductive electrode. A poly(dimethylsiloxane) stamp, patterned in bas-relief and supporting an 80-nanometer-thick gold film, is brought into contact with an 80-nanometer-thick film of poly(methylmethacrylate) supported on n -doped silicon. A voltage pulse between the gold film and the silicon transfers charge at the contact areas between the gold and the polymer electret. Areas as large as 1 square centimeter were patterned with trapped charges at a resolution better than 150 nanometers in less than 20 seconds. This process provides a new method for patterning; it suggests possible methods for high-density, charge-based data storage and for high-resolution charge-based printing.
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Cited by
Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals
Sundar, V. C., Zaumseil, J., Podzorov, V., Menard, E., Willett, R. L., Someya, T., Gershenson, M. E., & Rogers, J. A. (2004) · Science · doi:10.1126/science.1094196 · Cited by 1,640
Wang, S., Xie, Y., Niu, S., Lin, L., Liu, C., Zhou, Y. S., & Wang, Z. L. (2014) · Advanced Materials · doi:10.1002/adma.201402491 · Cited by 679
Kim, R.-H., Kim, D.-H., Xiao, J., Kim, B. H., Park, S.-I., Panilaitis, B., Ghaffari, R., Yao, J., Li, M., Liu, Z., et al. (2010) · Nature Materials · doi:10.1038/nmat2879 · Cited by 637
Metadata
- Authors
- Jacobs, H. O., & Whitesides, G. M.
- Venue
- Science
- Published
- 2001-03-02
- Volume
- 291
- Issue
- 5509
- Pages
- 1763-1766
- ISSN
- 0036-8075 (ISSN-L)
- 1095-9203
- OpenAlex
- W2094288102
- Cited by
- 374
- References
- 0
- FWCI
- 15.41
- Type
- journal article
- Language
- en
- Open access
- closed
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