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A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates
Abstract
We have produced a stretchable form of silicon that consists of submicrometer single-crystal elements structured into shapes with microscale, periodic, wavelike geometries. When supported by an elastomeric substrate, this “wavy” silicon can be reversibly stretched and compressed to large levels of strain without damaging the silicon. The amplitudes and periods of the waves change to accommodate these deformations, thereby avoiding substantial strains in the silicon itself. Dielectrics, patterns of dopants, electrodes, and other elements directly integrated with the silicon yield fully formed, high-performance “wavy” metal oxide semiconductor field-effect transistors, p-n diodes, and other devices for electronic circuits that can be stretched or compressed to similarly large levels of strain.
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Cited by
A stretchable carbon nanotube strain sensor for human-motion detection
Yamada, T., Hayamizu, Y., Yamamoto, Y., Yomogida, Y., Izadi-Najafabadi, A., Futaba, D. N., & Hata, K. (2011) · Nature Nanotechnology · doi:10.1038/nnano.2011.36 · Cited by 3,247
An ultra-lightweight design for imperceptible plastic electronics
Kaltenbrunner, M., Sekitani, T., Reeder, J., Yokota, T., Kuribara, K., Tokuhara, T., Drack, M., Schwödiauer, R., Graz, I., Bauer-Gogonea, S., et al. (2013) · Nature · doi:10.1038/nature12314 · Cited by 2,485
Stretchable active-matrix organic light-emitting diode display using printable elastic conductors
Sekitani, T., Nakajima, H., Maeda, H., Fukushima, T., Aida, T., Hata, K., & Someya, T. (2009) · Nature Materials · doi:10.1038/nmat2459 · Cited by 1,767
Van der Waals integration before and beyond two-dimensional materials
Liu, Y., Huang, Y., & Duan, X. (2019) · Nature · doi:10.1038/s41586-019-1013-x · Cited by 1,541
Self-citationXu, S., Zhang, Y., Cho, J., Lee, J., Huang, X., Jia, L., Fan, J. A., Su, Y., Su, J., Zhang, H., et al. (2013) · Nature Communications · doi:10.1038/ncomms2553 · Cited by 1,404
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Metadata
- Authors
- Khang, D.-Y., Jiang, H., Huang, Y., & Rogers, J. A.
- Venue
- Science
- Published
- 2006-01-13
- Volume
- 311
- Issue
- 5758
- Pages
- 208-212
- ISSN
- 0036-8075 (ISSN-L)
- 1095-9203
- OpenAlex
- W4212842305
- Cited by
- 1,689
- References
- 0
- FWCI
- 27.33
- Type
- journal article
- Language
- en
- Open access
- closed
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- Khang, D.-Y., Jiang, H., Huang, Y., & Rogers, J. A. (2006). A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates. Science. https://doi.org/10.1126/science.1121401
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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