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Nanoelectromechanical Systems
Abstract
Nanoelectromechanical systems are evolving, with new scientific studies and technical applications emerging. Mechanical devices are shrinking in thickness and width to reduce mass, increase resonant frequency, and lower the force constants of these systems. Advances in the field include improvements in fabrication processes and new methods for actuating and detecting motion at the nanoscale. Lithographic approaches are capable of creating freestanding objects in silicon and other materials, with thickness and lateral dimensions down to about 20 nanometers. Similar processes can make channels or pores of comparable dimensions, approaching the molecular scale. This allows access to a new experimental regime and suggests new applications in sensing and molecular interactions.
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Cited by
Zero-Mode Waveguides for Single-Molecule Analysis at High Concentrations
Levene, M. J., Korlach, J., Turner, S. W., Foquet, M., Craighead, H. G., & Webb, W. W. (2003) · Science · doi:10.1126/science.1079700 · Cited by 1,378
Self-citationMechanical properties of suspended graphene sheets
Frank, I. W., Tanenbaum, D. M., van der Zande, A. M., & McEuen, P. L. (2007) · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena · doi:10.1116/1.2789446 · Cited by 1,162
Micro- and nanomechanical sensors for environmental, chemical, and biological detection
Waggoner, P. S., & Craighead, H. G. (2007) · Lab on a Chip · doi:10.1039/b707401h · Cited by 678
Self-citationNear-field cavity optomechanics with nanomechanical oscillators
Anetsberger, G., Arcizet, O., Unterreithmeier, Q. P., Rivière, R., Schliesser, A., Weig, E. M., Kotthaus, J. P., & Kippenberg, T. J. (2009) · Nature Physics · doi:10.1038/nphys1425 · Cited by 499
Wafer-scale Reduced Graphene Oxide Films for Nanomechanical Devices
Robinson, J. T., Zalalutdinov, M., Baldwin, J. W., Snow, E. S., Wei, Z., Sheehan, P., & Houston, B. H. (2008) · Nano Letters · doi:10.1021/nl8023092 · Cited by 426
Metadata
- Authors
- Craighead, H. G.
- Venue
- Science
- Published
- 2000-11-24
- Volume
- 290
- Issue
- 5496
- Pages
- 1532-1535
- ISSN
- 0036-8075 (ISSN-L)
- 1095-9203
- OpenAlex
- W4248902135
- Cited by
- 1,437
- References
- 0
- FWCI
- 38.11
- Type
- journal article
- Language
- en
- Open access
- closed
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- Craighead, H. G. (2000). Nanoelectromechanical Systems. Science. https://doi.org/10.1126/science.290.5496.1532
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
