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Optical elements with ultrahigh spatial-frequency surface corrugations

Enger, Rolf C., Case, Steven K.·1983·Applied Optics

Abstract

In this paper we discuss the properties of optical elements fabricated by holographically recording an ultrahigh spatial-frequency pattern in a photoresist mask followed by reactive ion etching to transfer this pattern into the surface of a quartz substrate. Such optical elements are environmentally durable, potentially easy to replicate, and exhibit diffraction efficiencies in excess of 85%. In addition, two other properties are reported for the first time. Such elements at normal (0°) incidence are antireflective, with broadband reflection coefficients as low as 0.035%. Also, the elements exhibit artificially produced birefringence making them useful as wave plates. These results may be particularly significant in the UV and IR, where damage-resistant antireflection coatings and transparent birefringent materials may not exist.

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Metadata

Authors
Enger, R. C., & Case, S. K.
Venue
Applied Optics
Published
1983-10-15
Volume
22
Issue
20
Pages
3220
ISSN
  • 0003-6935 (ISSN-L)
  • 1539-4522
OpenAlex
W2124613098
Cited by
196
References
0
FWCI
1.49
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Optical elements with ultrahigh spatial-frequency surface corrugations. https://app.cochat.ai/papers/10.1364/ao.22.003220
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Enger, R. C., & Case, S. K. (1983). Optical elements with ultrahigh spatial-frequency surface corrugations. Applied Optics. https://doi.org/10.1364/ao.22.003220

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Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.