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Antireflection surfaces in silicon using binary optics technology
Abstract
Binary optics processing methods were applied to a silicon substrate to generate an array of small pillars in order to enhance transmission. The volume fraction of the silicon in the pillars was chosen to simulate a single homogeneous antireflection layer, and the pillar height was targeted to be a quarter-wave thickness. A mask was generated, using a graphics computer-aided design system; reactive-ion etching was used to generate the pillars. An improvement in long-wavelength infrared transmission is observed, with diffraction and scattering dominating at shorter wavelengths.
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Cited by
Waveguide sub‐wavelength structures: a review of principles and applications
Halir, R., Bock, P. J., Cheben, P., Ortega‐Moñux, A., Alonso‐Ramos, C., Schmid, J. H., Lapointe, J., Xu, D., Wangüemert‐Pérez, J. G., Molina‐Fernández, Í., et al. (2015) · Laser & Photonics Reviews · doi:10.1002/lpor.201400083 · Cited by 658
On the effective medium theory of subwavelength periodic structures
Lalanne, P., & Lemercier-lalanne, D. (1996) · Journal of Modern Optics · doi:10.1080/09500349608232871 · Cited by 296
Dielectric particle and void resonators for thin film solar cell textures
Mann, S. A., Grote, R. R., Osgood, R. M., & Schuller, J. A. (2011) · Optics Express · doi:10.1364/oe.19.025729 · Cited by 62
Metadata
- Authors
- Motamedi, M. E., Southwell, W. H., & Gunning, W. J.
- Venue
- Applied Optics
- Publisher
- Optica Publishing Group
- Published
- 1992-08-01
- Volume
- 31
- Issue
- 22
- Pages
- 4371
- ISSN
- 0003-6935 (ISSN-L)
- 1539-4522
- OpenAlex
- W2020309208
- Cited by
- 175
- References
- 0
- FWCI
- 2.06
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Antireflection surfaces in silicon using binary optics technology. https://app.cochat.ai/papers/10.1364/ao.31.004371
- The paper
- Motamedi, M. E., Southwell, W. H., & Gunning, W. J. (1992). Antireflection surfaces in silicon using binary optics technology. Applied Optics. https://doi.org/10.1364/ao.31.004371
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
