Effect of workpiece curvature on the tool influence function during hemispherical sub-aperture tool glass polishing
Open accessAbstract
The influence of workpiece curvature on the tool influence function spot during polishing of fused silica glass with cerium oxide slurry, while using a rotating hemispherical pad-foam tool for a wide variety of process conditions (tool displacement, inclination angle, and rotation rate), has been investigated. (Workpiece curvature ranged from 500 mm radius concave to 43 mm radius convex.) The TIF spot decreases in diameter and increases in the peak removal rate on more convex workpieces. In contrast, the TIF spot increases both in diameter and peak removal rate on more concave workpieces. For the range of workpiece curvatures investigated, both the spot size and the peak removal rate changed significantly, as much as 2 times. An elastic sphere–sphere contact mechanics model, which utilizes both a modified displacement (that leads to a change in the applied load) as well as a mismatch factor (that influences the pressure distribution shape), has been developed. The model was validated using both offline load-displacement measurements and finite-element analysis simulations. The model quantitatively describes the measured change in the relative contact diameter and relative pressure distribution, as well as semiquantitively describes the change in the relative volumetric removal rate on a large variety of TIF spots. The change in the volumetric removal rate for convex workpieces is a result of the balance between a decreasing spot size (reducing removal) and an increasing peak pressure (increasing removal), which usually results in relatively small changes in volumetric removal. In the case of concave workpieces, the volumetric removal rate change is also governed by a similar balance, but the spot size increase contribution dominates, resulting in a significant increase in volumetric removal rate. Understanding these trends can enable methods to add greater determinism during the fabrication of freeform optics by adjusting polishing parameters (such as dwell time) while the tool translates along a workpiece surface with different local curvatures.
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The smoothing mechanism is based on the workpiece-lap (or workpiece-tool) mismatch and the convergence concept, where greater pressure (and hence material removal) occurs at the taller surface height locations on the workpiece relative to the lower surface height locations, resulting in a reduction of overall height variations with polishing.
“The smoothing mechanism is based on the workpiece-lap (or workpiece-tool) mismatch and the convergence concept, where greater pressure (and hence material removal) occurs at the taller surface height locations on the workpiece relative to the lower surface height locations resulting in a reduction of overall height variations with polishing[21-24].”
From Smoothing tool design and performance during subaperture glass polishing (2023) · cites this paper as [22]
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Research works printed but not linked: 3
- L. Kong, C. Cheung, W. Lee, and S. To, "An integrated manufacturing system for the design, fabrication, and measurement of ultra-precision freeform optics," IEEE transactions on electronics packaging manufacturing 33, 244-254 (2010).
- O. Cakmakci and J. Rolland, "Design and fabrication of a dual-element off- axis near-eye optical magnifier," Optics letters 32, 1363-1365 (2007).
- T. Suratwala, Materials Science and Technology of Optical Fabrication (Wiley, Hoboken, NJ, 2018).
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Smoothing tool design and performance during subaperture glass polishing
Suratwala, T., Tham, G., Steele, R., Wong, L., Menapace, J., Ray, N., & Bauman, B. (2023) · Applied Optics · doi:10.1364/ao.482739 · Cited by 11 · see citing works
Self-citation
- Authors
- Suratwala, T., Menapace, J., Tham, G., Steele, R., Wong, L., Ray, N., Bauman, B., Gregory, M., & Hordin, T.
- Affiliations
- Lawrence Livermore National Laboratory (US)
- Optimax (United States) (US)
- Corresponding author
- Suratwala, T.
- Menapace, J.
- Tham, G.
- Steele, R.
- Wong, L.
- Ray, N.
- Bauman, B.
- Gregory, M.
- Hordin, T.
- Venue
- Applied Optics
- Publisher
- Optica Publishing Group
- Published
- 2021-01-28
- Volume
- 60
- Issue
- 4
- Pages
- 1041
- ISSN
- 0003-6935 (ISSN-L)
- 1559-128X
- 2155-3165
- OpenAlex
- W3121116162
- Cited by
- 14
- References
- 0
- Citations by year
- 2026: 2 · 2025: 2 · 2024: 3 · 2023: 4 · 2022: 3
- FWCI
- 0.76
- Type
- journal article
- Language
- en
- Open access
- green
- www.osti.gov
- Licence
- Locations
- Applied Optics (publishedVersion)
- PubMed (publishedVersion)
- OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) (submittedVersion)
- Funders
- Lawrence Livermore National Laboratory (LLNL-JRNL-816719)
- U.S. Department of Energy (DE-AC52-07NA27344)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Surface Polishing Techniques
- Physical Sciences › Engineering › Computational Mechanics › Surface Roughness and Optical Measurements
- Physical Sciences › Engineering › Mechanical Engineering › Advanced machining processes and optimization
- Keywords
- tool influence function, fused silica, contact pressure distribution
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