The DOI matches its Crossref record; 3 of the 3 references it cites were found in a registry or an index.
65 nm feature sizes using visible wavelength 3-D multiphoton lithography
Open accessAbstract
Nanoscale features as small as 65 +/- 5 nm have been formed reproducibly by using 520 nm femtosecond pulsed excitation of a 4,4'-bis(di-n-butylamino)biphenyl chromophore to initiate crosslinking in a triacrylate blend. Dosimetry studies of the photoinduced polymerization were performed on chromophores with sizable two-photon absorption cross-sections at 520 and 730 nm. These studies show that sub-diffraction limited line widths are obtained in both cases with the lines written at 520 nm being smaller. Three-dimensional multiphoton lithography at 520 nm has been used to fabricate polymeric woodpile photonic crystal structures that show stop bands in the near-infrared spectral region.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cites
Finer features for functional microdevices
Kawata, S., Sun, H.-B., Tanaka, T., & Takada, K. (2001) · Nature · doi:10.1038/35089130 · Cited by 2,871
Direct laser writing of three-dimensional photonic-crystal templates for telecommunications
Deubel, M., von Freymann, G., Wegener, M., Pereira, S., Busch, K., & Soukoulis, C. M. (2004) · Nature Materials · doi:10.1038/nmat1155 · Cited by 1,083
Complex micromachines produced and driven by light
Galajda, P., & Ormos, P. (2001) · Applied Physics Letters · doi:10.1063/1.1339258 · Cited by 565
Cited by
3D printed microfluidic devices: enablers and barriers
Waheed, S., Cabot, J. M., Macdonald, N. P., Lewis, T., Guijt, R. M., Paull, B., & Breadmore, M. C. (2016) · Lab on a Chip · doi:10.1039/c6lc00284f · Cited by 1,039
Ultrafast laser nanostructuring of photopolymers: a decade of advances
Malinauskas, M., Farsari, M., Piskarskas, A., & Juodkazis, S. (2013) · Physics Reports · doi:10.1016/j.physrep.2013.07.005 · Cited by 431
Recent progress in multiphoton microfabrication
Maruo, S., & Fourkas, J. T. (2008) · Laser & Photonics Reviews · doi:10.1002/lpor.200710039 · Cited by 390
3D printing of functional microrobots
Li, J., & Pumera, M. (2021) · Chemical Society Reviews · doi:10.1039/d0cs01062f · Cited by 303
Ovsianikov, A., Mironov, V., Stampfl, J., & Liska, R. (2012) · Expert Review of Medical Devices · doi:10.1586/erd.12.48 · Cited by 160
Metadata
- Authors
- Haske, W., Chen, V. W., Hales, J. M., Dong, W., Barlow, S., Marder, S. R., & Perry, J. W.
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2007
- Volume
- 15
- Issue
- 6
- Pages
- 3426
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2019394610
- Cited by
- 319
- References
- 3
- FWCI
- 13.26
- Type
- journal article
- Language
- en
- Open access
- gold
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: 65 nm feature sizes using visible wavelength 3-D multiphoton lithography. https://app.cochat.ai/papers/10.1364/oe.15.003426
- The paper
- Haske, W., Chen, V. W., Hales, J. M., Dong, W., Barlow, S., Marder, S. R., & Perry, J. W. (2007). 65 nm feature sizes using visible wavelength 3-D multiphoton lithography. Optics Express. https://doi.org/10.1364/oe.15.003426
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
