The DOI matches its Crossref record; 3 of the 3 references it cites were found in a registry or an index.
Mechanisms of three-dimensional structuring of photo-polymers by tightly focussed femtosecond laser pulses
Open accessAbstract
Three-dimensional (3D) micro/nano-structuring of photo-resists is systematically studied at the close-to-dielectric- breakdown irradiance. It is demonstrated that avalanche absorption is playing a major part in free electron generation and chemical bond breaking at these conditions. The steps of photo-initiation and chemical bond breaking in propagation of polymerization are altered as compared with photo-polymerization at low-irradiance and one-photon stereo-lithography. The avalanche dominates radical generation and promotion of polymerization at tight focusing and a high approximately TW/cm(2) irradiance. The rates of electron generation by two-photon absorption and avalanche are calculated for the experimental conditions. Simulation results are corroborated by 3D polymerization in three resists with different photo-initiators at two different wavelengths and pulse durations. The smallest feature sizes of 3D polymerized logpile structures are consistent with spectral dependencies of the two photon nonlinearities. Implications of these findings for achieving sub-100 nm resolution in 3D structuring of photo-polymers are presented.
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Cites
Finer features for functional microdevices
Kawata, S., Sun, H.-B., Tanaka, T., & Takada, K. (2001) · Nature · doi:10.1038/35089130 · Cited by 2,871
Three-dimensional microfabrication with two-photon-absorbed photopolymerization
Maruo, S., Nakamura, O., & Kawata, S. (1997) · Optics Letters · doi:10.1364/ol.22.000132 · Cited by 1,952
Femtosecond waveguide writing: a new avenue to three-dimensional integrated optics
Nolte, S., Will, M., Burghoff, J., & Tuennermann, A. (2003) · Applied Physics A: Materials Science & Processing · doi:10.1007/s00339-003-2088-6 · Cited by 545
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Scalable submicrometer additive manufacturing
Saha, S. K., Wang, D., Nguyen, V. H., Chang, Y., Oakdale, J. S., & Chen, S.-C. (2019) · Science · doi:10.1126/science.aax8760 · Cited by 513
Ultrafast laser nanostructuring of photopolymers: a decade of advances
Malinauskas, M., Farsari, M., Piskarskas, A., & Juodkazis, S. (2013) · Physics Reports · doi:10.1016/j.physrep.2013.07.005 · Cited by 431
Self-citationUltrahigh-printing-speed photoresists for additive manufacturing
Liu, T., Tao, P., Wang, X., Wang, H., He, M., Wang, Q., Cui, H., Wang, J., Tang, Y., Tang, J., et al. (2024) · Nature Nanotechnology · doi:10.1038/s41565-023-01517-w · Cited by 63
Metadata
- Authors
- Malinauskas, M., Žukauskas, A., Bičkauskaitė, G., Gadonas, R., & Juodkazis, S.
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2010-04-30
- Volume
- 18
- Issue
- 10
- Pages
- 10209
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2019120138
- Cited by
- 234
- References
- 3
- FWCI
- 13.29
- Type
- journal article
- Language
- en
- Open access
- gold
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- Malinauskas, M., Žukauskas, A., Bičkauskaitė, G., Gadonas, R., & Juodkazis, S. (2010). Mechanisms of three-dimensional structuring of photo-polymers by tightly focussed femtosecond laser pulses. Optics Express. https://doi.org/10.1364/oe.18.010209
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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