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An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film
Open accessAbstract
Optical structures fabricated on silicon-on-insulator technology provide a convenient platform for the implementation of highly compact, versatile and low cost devices. In this work, we demonstrate the promise of this technology for integrated low power and low cost optical gas sensing. A room temperature ethanol vapor sensor is demonstrated using a ZnO nanoparticle film as a coating on an SOI micro-ring resonator of 5 microm in radius. The local coating on the ring resonators is prepared from colloidal suspensions of ZnO nanoparticles of around 3 nm diameter. The porous nature of the coating provides a large surface area for gas adsorption. The ZnO refractive index change upon vapor adsorption shifts the microring resonance through evanescent field interaction. Ethanol vapor concentrations down to 100 ppm are detected with this sensing configuration and a detection limit below 25 ppm is estimated.
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Cites
On-chip gas detection in silicon optical microcavities
Robinson, J. T., Chen, L., & Lipson, M. (2008) · Optics Express · doi:10.1364/oe.16.004296 · Cited by 342
Cited by
Bogaerts, W., De Heyn, P., Van Vaerenbergh, T., De Vos, K., Kumar Selvaraja, S., Claes, T., Dumon, P., Bienstman, P., Van Thourhout, D., & Baets, R. (2012) · Laser & Photonics Reviews · doi:10.1002/lpor.201100017 · Cited by 2,643
Self-citationOptical ring resonators for biochemical and chemical sensing
Sun, Y., & Fan, X. (2011) · Analytical and Bioanalytical Chemistry · doi:10.1007/s00216-010-4237-z · Cited by 355
Jiang, X., Qavi, A. J., Huang, S. H., & Yang, L. (2020) · Matter · doi:10.1016/j.matt.2020.07.008 · Cited by 353
High-Q Optical Sensors for Chemical and Biological Analysis
Luchansky, M. S., & Bailey, R. C. (2012) · Analytical Chemistry · doi:10.1021/ac2029024 · Cited by 288
3D Printed Sensors for Biomedical Applications: A Review
Han, T., Kundu, S., Nag, A., & Xu, Y. (2019) · Sensors · doi:10.3390/s19071706 · Cited by 266
Metadata
- Authors
- Yebo, N. A., Lommens, P., Hens, Z., & Baets, R.
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2010-05-20
- Volume
- 18
- Issue
- 11
- Pages
- 11859
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2052612732
- Cited by
- 172
- References
- 1
- FWCI
- 10.47
- Type
- journal article
- Language
- en
- Open access
- gold
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- Yebo, N. A., Lommens, P., Hens, Z., & Baets, R. (2010). An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film. Optics Express. https://doi.org/10.1364/oe.18.011859
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
