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Femtosecond laser-assisted three-dimensional microfabrication in silica
Open accessAbstract
We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10mum in diameter inside the volume with any angle of interconnection and a high aspect ratio (10mum -diameter channels in a 100mum -thick silica slab).
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Citations
Cited by
Ultrafast lasers—reliable tools for advanced materials processing
Sugioka, K., & Cheng, Y. (2014) · Light: Science & Applications · doi:10.1038/lsa.2014.30 · Cited by 1,545
Femtosecond laser three-dimensional micro- and nanofabrication
Sugioka, K., & Cheng, Y. (2014) · Applied Physics Reviews · doi:10.1063/1.4904320 · Cited by 490
Ultrafast Processes for Bulk Modification of Transparent Materials
Itoh, K., Watanabe, W., Nolte, S., & Schaffer, C. B. (2006) · MRS Bulletin · doi:10.1557/mrs2006.159 · Cited by 463
Applications of femtosecond laser induced self‐organized planar nanocracks inside fused silica glass
Taylor, R., Hnatovsky, C., & Simova, E. (2008) · Laser & Photonics Reviews · doi:10.1002/lpor.200710031 · Cited by 345
Ams, M., Marshall, G. D., Dekker, P., Dubov, M., Mezentsev, V. K., Bennion, I., & Withford, M. J. (2008) · IEEE Journal of Selected Topics in Quantum Electronics · doi:10.1109/jstqe.2008.925809 · Cited by 130
Metadata
- Authors
- Marcinkevičius, A., Juodkazis, S., Watanabe, M., Miwa, M., Matsuo, S., Misawa, H., & Nishii, J.
- Venue
- Optics Letters
- Publisher
- Optica Publishing Group
- Published
- 2001-03-01
- Volume
- 26
- Issue
- 5
- Pages
- 277
- ISSN
- 0146-9592 (ISSN-L)
- 1539-4794
- OpenAlex
- W1999312098
- Cited by
- 736
- References
- 0
- FWCI
- 22.22
- Type
- journal article
- Language
- en
- Open access
- green
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- Marcinkevičius, A., Juodkazis, S., Watanabe, M., Miwa, M., Matsuo, S., Misawa, H., & Nishii, J. (2001). Femtosecond laser-assisted three-dimensional microfabrication in silica. Optics Letters. https://doi.org/10.1364/ol.26.000277
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