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Losses in single-mode silicon-on-insulator strip waveguides and bends
Open accessAbstract
We report the fabrication and accurate measurement of propagation and bending losses in single-mode silicon waveguides with submicron dimensions fabricated on silicon-on-insulator wafers. Owing to the small sidewall surface roughness achieved by processing on a standard 200mm CMOS fabrication line, minimal propagation losses of 3.6+/-0.1dB/cm for the TE polarization were measured at the telecommunications wavelength of 1.5microm. Losses per 90 masculine bend are measured to be 0.086+/-0.005dB for a bending radius of 1microm and as low as 0.013+/-0.005dB for a bend radius of 2microm. These record low numbers can be used as a benchmark for further development of silicon microphotonic components and circuits.
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Cited by
Bogaerts, W., De Heyn, P., Van Vaerenbergh, T., De Vos, K., Kumar Selvaraja, S., Claes, T., Dumon, P., Bienstman, P., Van Thourhout, D., & Baets, R. (2012) · Laser & Photonics Reviews · doi:10.1002/lpor.201100017 · Cited by 2,643
Micrometre-scale silicon electro-optic modulator
Xu, Q., Schmidt, B., Pradhan, S., & Lipson, M. (2005) · Nature · doi:10.1038/nature03569 · Cited by 2,386
Imaging topological edge states in silicon photonics
Hafezi, M., Mittal, S., Fan, J., Migdall, A., & Taylor, J. M. (2013) · Nature Photonics · doi:10.1038/nphoton.2013.274 · Cited by 1,715
Jalali, B., & Fathpour, S. (2006) · Journal of Lightwave Technology · doi:10.1109/jlt.2006.885782 · Cited by 1,423
Active control of slow light on a chip with photonic crystal waveguides
Vlasov, Y. A., O'Boyle, M., Hamann, H. F., & McNab, S. J. (2005) · Nature · doi:10.1038/nature04210 · Cited by 1,314
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Metadata
- Authors
- Vlasov, Y. A., & McNab, S. J.
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2004
- Volume
- 12
- Issue
- 8
- Pages
- 1622
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2157420334
- Cited by
- 990
- References
- 0
- FWCI
- 56.57
- Type
- journal article
- Language
- en
- Open access
- gold
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- Vlasov, Y. A., & McNab, S. J. (2004). Losses in single-mode silicon-on-insulator strip waveguides and bends. Optics Express. https://doi.org/10.1364/opex.12.001622
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