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Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment
Open accessAbstract
Using a combination of resist reflow to form a highly circular etch mask pattern and a low-damage plasma dry etch, high-quality-factor silicon optical microdisk resonators are fabricated out of silicon-on-insulator (SOI) wafers. Quality factors as high as Q = 5x10(6) are measured in these microresonators, corresponding to a propagation loss coefficient as small as alpha ~ 0.1 dB/cm. The different optical loss mechanisms are identified through a study of the total optical loss, mode coupling, and thermally-induced optical bistability as a function of microdisk radius (5-30 microm). These measurements indicate that optical loss in these high-Q microresonators is limited not by surface roughness, but rather by surface state absorption and bulk free-carrier absorption.
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Cai, M., Painter, O., & Vahala, K. J. (2000) · Physical Review Letters · doi:10.1103/physrevlett.85.74 · Cited by 912
Self-citation
Cited by
Bogaerts, W., De Heyn, P., Van Vaerenbergh, T., De Vos, K., Kumar Selvaraja, S., Claes, T., Dumon, P., Bienstman, P., Van Thourhout, D., & Baets, R. (2012) · Laser & Photonics Reviews · doi:10.1002/lpor.201100017 · Cited by 2,643
Jalali, B., & Fathpour, S. (2006) · Journal of Lightwave Technology · doi:10.1109/jlt.2006.885782 · Cited by 1,423
Dielectric microcavities: Model systems for wave chaos and non-Hermitian physics
Cao, H., & Wiersig, J. (2015) · Reviews of Modern Physics · doi:10.1103/revmodphys.87.61 · Cited by 686
Broadband mid-infrared frequency comb generation in a Si_3N_4 microresonator
Luke, K., Okawachi, Y., Lamont, M. R. E., Gaeta, A. L., & Lipson, M. (2015) · Optics Letters · doi:10.1364/ol.40.004823 · Cited by 648
Optical resonators with whispering-gallery modes-part II: applications
Ilchenko, V. S., & Matsko, A. B. (2006) · IEEE Journal of Selected Topics in Quantum Electronics · doi:10.1109/jstqe.2005.862943 · Cited by 591
Metadata
- Authors
- Borselli, M., Johnson, T. J., & Painter, O.
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2005
- Volume
- 13
- Issue
- 5
- Pages
- 1515
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2066219575
- Cited by
- 494
- References
- 1
- FWCI
- 30.19
- Type
- journal article
- Language
- en
- Open access
- gold
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