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Crystallite coalescence: A mechanism for intrinsic tensile stresses in thin films
Abstract
We examined the stress associated with crystallite coalescence during the initial stages of growth in thin polycrystalline films with island growth morphology. As growing crystallites contacted each other at their bases, the side-walls zipped together until a balance was reached between the energy associated with eliminating surface area, creating a grain boundary and straining the film. Our estimate for the resulting strain depends only on interfacial free energies, elastic properties, and grain size and predicts large tensile stresses in agreement with experimental results. We also discuss possible stress relaxation mechanisms that can occur during film growth subsequent to the coalescence event.
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Cited by
Nano-kirigami with giant optical chirality
Liu, Z., Du, H., Li, J., Lu, L., Li, Z.-Y., & Fang, N. X. (2018) · Science Advances · doi:10.1126/sciadv.aat4436 · Cited by 322
Kinetic Model for Dependence of Thin Film Stress on Growth Rate, Temperature, and Microstructure
Chason, E., Shin, J. W., Hearne, S. J., & Freund, L. B. (2012) · Journal of Applied Physics · doi:10.1063/1.4704683 · Cited by 134
Metadata
- Authors
- Nix, W. D., & Clemens, B. M.
- Venue
- Journal of Materials Research
- Published
- 1999-08
- Volume
- 14
- Issue
- 8
- Pages
- 3467-3473
- ISSN
- 0884-1616 (ISSN-L)
- 0884-2914
- 2044-5326
- OpenAlex
- W2142429416
- Cited by
- 661
- References
- 0
- FWCI
- 23.56
- Type
- journal article
- Language
- en
- Open access
- closed
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- Nix, W. D., & Clemens, B. M. (1999). Crystallite coalescence: A mechanism for intrinsic tensile stresses in thin films. Journal of Materials Research. https://doi.org/10.1557/jmr.1999.0468
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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