Metal Oxide Nanoparticle Photoresists for EUV Patterning

The authors gratefully acknowledgeSEMATECH for funding, as well as the CornellNanoscale Science and Technology Facility(CNF), Cornell Center of Materials Research(CCMR), the Nanobiotechnology Center (NBTC)and the KAUST-Cornell Center of Energy andSustainability (KAUST_CU) and LawrenceBerkeley Nat…