High Sensitivity MEMS Ultrasound Arrays by Lateral Ferroelectric Polarization
Open accessAbstract
This paper discusses the design of advanced micromachined ferroelectric ultrasound transducers for use at 3 MHz.16 X 16 arrays of resonant monomorph sensors have been constructed, with sol-gel PZT as the active ferroelectric layer deposited on insulating layers of ZrOz and SiOz.A novel in-plane polarization of the PZT is used to maximize sensitivity, while trading off reduced output capacitance to match the CMOS buffer electronics.This results in about 30 dB improved sensitivity compared to conventional polarizing across the thickness of the PZT layer.Fluid-filled through wafer holes are used as an acoustic matching network to achieve resonance at both 1 and 3 MHz.A lumped element equivalent circuit model is presented, as well as Finite Element Analysis results.Performance predictions for projector efficiency and receive response are given.Test results are presented including transmit response, receive sensitivity, and frequency response.
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Employment and higher wages are associated with lower rates of criminal activity.
“Research has shown that employment and higher wages are associated with lower rates of criminal activity (Bernstein and Houston 2000; Western and Pettit 2000).”
From Health and Prisoner Reentry: How Physical, Mental, and Substance Abuse Conditions Shape the Process of Reintegration: (719772011-001) (2008) · cites this paper as Bernstein and Houston 2000
The Finite Element Analysis and Predicted Transmit and Receive Sensitivity sections discuss ultrasound transducers, not employment, wages, or crime; the supplied passages give no page numbers. Searches for the quoted claim and for employment, wages, and criminal activity found no relevant passage in our copy. (LLM, conf=0.79)
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References 10
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- J. Bernstein, S.L. Finberg, K. Houston, L.C. Niles, H.D. Chen, L.E. Cross, K.K. Li, and K. Udayakumar., "Micromachined High Frequency Ferroelectric Sonar Transducers", IEEE Transactions on Ultrasonics, Ferroelecmrics and Frequency Control, Vol. 44, No. 5, September 1997, pp. 960-969.
- X. Jin, I. Ladabaum, and B.T. Khuri-Yakub, "The Microfabrication of Capacitive Ultrasonic Transducers", IEEE Journal of Microelectromechanical Systems, Vol. 7, # 3, September 1998, pp. 295-302.
- R.G. Swartz, Application of Polyvinylidene Fluoride to Monolithic Silicon PVF2 Transducer Arrays, Ph.D. Dissertation, Stanford University, (May 1979).
- J.H. MO, J.B. Fowlkes, A.L. Robinson, and P.L. Carson, "Crosstalk Reduction with a Micromachined Diaphragm Structure for Integrated Ultrasound Transducer Arrays," IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control, Vol. 38, (January 1992), pp. 48-53.
- H.D. Chen, K.R. Udayakumar, C.J. Gaskey, L.E. Cross, J.J. Bernstein, and L.C. Niles, "Fabrication and electrical properties of lead zirconate titanate thick films", Journal of the American Ceramic Society, vol. 79, no.8 , pp. 2189-92, 1996.
- B. Xu, Y. Ye, L.E. Cross, J. Bernstein and R. Miller, "Dielectric hysteresis from transverse electric fields in lead zirconate titanate thin films", Applied Physics Letters, vol. 74, # 23, pp. 3549-3551, (7 June 1999).
- Kinsler, Frey, Coppens and Sanders, Fundamentals of Acoustics, 3ti edition, (John Wiley and Sons, 1982), pp. 191-193.
- Leo L. Beranek, Acoustical Measurements, 1988 Edition, (Acoustical Society of America / American Institute of Physics, 1988), pp. 113-122.
- R. J. Bobber, Underwater Electra Acoustic Measurements, (Peninsula Press, 1988 ) pp. 27-45.
- Authors
- Bernstein, J. J., Bottari, J., Houston, K., Kirkos, G., Miller, R., Xu, B., Ye, Y., & Cross, L. E.
- Affiliations
- Draper Laboratory (US)
- Pennsylvania State University (US)
- ORCID
- Bernstein, J.J.
- Venue
- 2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest
- Publisher
- Transducer Research Foundation, Inc.
- Published
- 2000-06-04
- Pages
- 281-284
- OpenAlex
- W3113978552
- Cited by
- 0
- References
- 10
- FWCI
- 0.00
- Type
- conference paper
- Language
- en
- Open access
- hybrid
- doi.org
- Licence
- cc-by
- Locations
- Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop) (publishedVersion, cc-by)
- Funders
- Defense Advanced Research Projects Agency
- Topics
- Physical Sciences › Engineering › Mechanics of Materials › Ultrasonics and Acoustic Wave Propagation
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Materials Science › Materials Chemistry › Ferroelectric and Piezoelectric Materials
- Keywords
- ferroelectric polarization, lead zirconate titanate, ultrasonic array, acoustic impedance matching, equivalent circuit model, receiver sensitivity
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