Nakamura, Norio

High Energy Accelerator Research Organization

1 paper on CoChatORCID 0000-0002-6788-5224

Most cited papers

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High-power EUV free-electron laser for future lithography
Nakamura, N., Kato, R., Sakai, H., Tsuchiya, K., Tanimoto, Y., Honda, Y., Miyajima, T., Shimada, M., Tanikawa, T., Tanaka, O. A., et al. (2023) · Japanese Journal of Applied Physics
Particle Accelerators and Free-Electron LasersAdvancements in Photolithography Techniques
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