Kovalevich, Tatiana

IMEC

1 paper on CoChatORCID 0000-0001-9633-8257

Most cited papers

Verified
Evaluation of Lines and Spaces printing and general understanding of imaging with dark field low-n mask
Kovalevich, T., Van Look, L., Franke, J.-H., & Philipsen, V. (2023) · Journal of Micro/Nanopatterning, Materials, and Metrology
Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques
Cited by 18

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