Rutigliani, Vito

IMEC

1 paper on CoChatORCID 0000-0003-1944-9337

Most cited papers

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Need for LWR metrology standardization: the imec roughness protocol
Lorusso, G. F., Sutani, T., Rutigliani, V., van Roey, F., Moussa, A., Charley, A.-L., Mack, C., Naulleau, P., Perera, C., Constantoudis, V., et al. (2018) · Journal of Micro/Nanopatterning, Materials, and Metrology
Advancements in Photolithography TechniquesSurface Roughness and Optical Measurements
Cited by 59

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