Lugier, Olivier

Extreme ultraviolet photoemission of a tin-based photoresist

Zhang, Y., Haitjema, J., Castellanos, S., Lugier, O., Sadegh, N., Ovsyannikov, R., Giangrisostomi, E., Johansson, F. O. L., Berggren, E., Lindblad, A., et al. (2021) · Applied Physics Letters

Advancements in Photolithography TechniquesElectron and X-Ray Spectroscopy Techniques

Cited by 35

Bottom-Up Nanofabrication with Extreme-Ultraviolet Light: Metal–Organic Frameworks on Patterned Monolayers

Lugier, O., Thakur, N., Wu, L., Vockenhuber, M., Ekinci, Y., & Castellanos, S. (2021) · ACS Applied Materials & Interfaces

Advancements in Photolithography TechniquesNanofabrication and Lithography Techniques

Cited by 13