Wagner, Christian
ASML (Netherlands)
2 papers on CoChatORCID 0000-0002-2117-6289
Most cited papers
- Verified
Lithography gets extreme
Wagner, C., & Harned, N. (2010) · Nature Photonics
Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques
Cited by 650
- Verified
EUV lithography performance for manufacturing: status and outlook
Pirati, A., Peeters, R., Smith, D., Lok, S., van Noordenburg, M., van Es, R., Verhoeven, E., Meijer, H., Minnaert, A., van der Horst, J.-W., et al. (2016) · SPIE Proceedings
Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques
Cited by 95
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