Tanaka, Y.

Association of Super-Advanced Electronics

1 paper on CoChatORCID 0000-0002-3931-5005

Most cited papers

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Lithographic performance of high-numerical-aperture (NA=0.3) EUV small-field exposure tool (HINA)
Oizumi, H., Tanaka, Y., Kumasaka, F., Nishiyama, I., Kondo, H., Shiraishi, M., Oshino, T., Sugisaki, K., & Murakami, K. (2005) · SPIE Proceedings
Advancements in Photolithography TechniquesAdvanced optical system design
Cited by 37

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