Goldberg, Kenneth A.

Lawrence Berkeley National Laboratory

1 paper on CoChatORCID 0000-0001-9984-5780

Most cited papers

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Status of EUV micro-exposure capabilities at the ALS using the 0.3-NA MET optic
Naulleau, P., Goldberg, K. A., Anderson, E. H., Bradley, K., Delano, R., Denham, P., Gunion, B., Harteneck, B., Hoef, B., Huang, H., et al. (2004) · SPIE Proceedings
Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques
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