van de Kerkhof, Mark A.

1 paper on CoChatORCID 0000-0001-6837-6897

Most cited papers

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EUV pellicle scanner integration for N2 nodes and beyond
van de Kerkhof, M. A., Klein, A., Seoane, B., Vermeulen, P., Gallagher, E., Timmermans, M. Y., Pollentier, I., & Bekaert, J. (2023) · Optical and EUV Nanolithography XXXVI
Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques
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