The DOI matches its Crossref record.
Spectroscopic Ellipsometry: Principles and Applications
Abstract
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cited by
Kischkat, J., Peters, S., Gruska, B., Semtsiv, M., Chashnikova, M., Klinkmüller, M., Fedosenko, O., Machulik, S., Aleksandrova, A., Monastyrskyi, G., et al. (2012) · Applied Optics · doi:10.1364/ao.51.006789 · Cited by 1,019
Löper, P., Stuckelberger, M., Niesen, B., Werner, J., Filipič, M., Moon, S.-J., Yum, J.-H., Topič, M., De Wolf, S., & Ballif, C. (2015) · The Journal of Physical Chemistry Letters · doi:10.1021/jz502471h · Cited by 587
Machine learning powered ellipsometry
Liu, J., Zhang, D., Yu, D., Ren, M., & Xu, J. (2021) · Light: Science & Applications · doi:10.1038/s41377-021-00482-0 · Cited by 102
Andrei, F., Ion, V., Bîrjega, R., Dinescu, M., Enea, N., Pantelica, D., Mihai, M. D., Maraloiu, V.-A., Teodorescu, V. S., Marcu, I.-C., et al. (2021) · Nanomaterials · doi:10.3390/nano11061371 · Cited by 22
Chen, X., & Pickwell-MacPherson, E. (2019) · Sensors · doi:10.3390/s19194118 · Cited by 18
Metadata
- Authors
- Fujiwara, H.
- Venue
- Wiley eBooks
- Publisher
- Wiley
- Published
- 2007-01-26
- OpenAlex
- W4249556850
- Cited by
- 1,621
- References
- 0
- FWCI
- 16.96
- Type
- book
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Spectroscopic Ellipsometry: Principles and Applications. https://app.cochat.ai/papers/10.1002/9780470060193
- The paper
- Fujiwara, H. (2007). Spectroscopic Ellipsometry: Principles and Applications. Wiley eBooks. https://doi.org/10.1002/9780470060193
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
