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Introduction to Microfabrication
Abstract
Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions.Featuring:* A comprehensive presentation of basic fabrication processes* An emphasis on materials and microstructures, rather than devic
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Citations
Cited by
MOF positioning technology and device fabrication
Falcaro, P., Ricco, R., Doherty, C. M., Liang, K., Hill, A. J., & Styles, M. J. (2014) · Chem. Soc. Rev. · doi:10.1039/c4cs00089g · Cited by 710
Low temperature thin films for next-generation microelectronics (invited)
Schmitz, J. (2018) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2017.11.013 · Cited by 103
Experimental Techniques for Thin-Film Thermal Conductivity Characterization
Borca-Tasciuc, T., & Chen, G. (2006) · Physics of Solids and Liquids · doi:10.1007/0-387-26017-x_9 · Cited by 23
Metadata
- Authors
- Franssila, S.
- Venue
- Wiley eBooks
- Publisher
- Wiley
- Published
- 2010-09-17
- OpenAlex
- W1562661071
- Cited by
- 546
- References
- 0
- FWCI
- 18.79
- Type
- book
- Language
- en
- Open access
- closed
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Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
