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Synthesis of Vertical High‐Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template
Abstract
Growth of vertical epitaxial Si(100) nanowires on Si(100) substrates is demonstrated (see figure) using a combination of an anodic aluminum oxide template, catalytic Au particles embedded in nanopores directly on the Si substrate by using electroless deposition, and vapor–liquid–solid growth using SiH4. HF acid treatment of the porous alumina template is important to realize a direct contact between deposited Au in the AAO nanopores and the Si substrate.
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Cited by
Huang, Z., Zhang, X., Reiche, M., Liu, L., Lee, W., Shimizu, T., Senz, S., & Gösele, U. (2008) · Nano Letters · doi:10.1021/nl802324y · Cited by 329
Self-citationJoshi, R. K., & Schneider, J. J. (2012) · Chemical Society Reviews · doi:10.1039/c2cs35089k · Cited by 270
Wolfsteller, A., Geyer, N., Nguyen-Duc, T.-K., Das Kanungo, P., Zakharov, N. D., Reiche, M., Erfurth, W., Blumtritt, H., Kalem, S., Werner, P., et al. (2010) · Thin Solid Films · doi:10.1016/j.tsf.2009.08.021 · Cited by 54
Self-citationGeometry-dependent terahertz emission of silicon nanowires
Jung, G. B., Cho, Y. J., Myung, Y., Kim, H. S., Seo, Y. S., Park, J., & Kang, C. (2010) · Optics Express · doi:10.1364/oe.18.016353 · Cited by 48
Metadata
- Authors
- Shimizu, T., Xie, T., Nishikawa, J., Shingubara, S., Senz, S., & Gösele, U.
- Venue
- Advanced Materials
- Publisher
- Wiley
- Published
- 2007-03-02
- Volume
- 19
- Issue
- 7
- Pages
- 917-920
- ISSN
- 0935-9648 (ISSN-L)
- 1521-4095
- OpenAlex
- W2122725944
- Cited by
- 184
- References
- 0
- FWCI
- 13.72
- Type
- journal article
- Language
- en
- Open access
- closed
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- Shimizu, T., Xie, T., Nishikawa, J., Shingubara, S., Senz, S., & Gösele, U. (2007). Synthesis of Vertical High‐Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template. Advanced Materials. https://doi.org/10.1002/adma.200700153
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