Semiconductor Gas Sensors: Dry Synthesis and Application

Abstract

Since the development of the first chemoresistive metal oxide based gas sensors, transducers with innovative properties have been prepared by a variety of wet‐ and dry‐deposition methods. Among these, direct assembly of nanostructured films from the gas phase promises simple fabrication and control and with the appropriate synthesis and deposition methods nm to μm thick films, can be prepared. Dense structures are achieved by tuning chemical or vapor deposition methods whereas particulate films are obtained by deposition of airborne, mono‐ or polydisperse, aggregated or agglomerated nanoparticles. Innovative materials in non‐equilibrium or sub‐stoichiometric states are captured by rapid cooling during their synthesis. This Review presents some of the most common chemical and vapor‐deposition methods for the synthesis of semiconductor metal oxide based detectors for chemical gas sensors. In addition, the synthesis of highly porous films by novel aerosol methods is discussed. A direct comparison of structural and chemical properties with sensing performance is given.