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Measurement of Sheet Resistivities with the Four-Point Probe
Abstract
Correction factors are evaluated for the measurement of sheet resistirities on two-dimensional rectangular and circular samples with the four-point probe. Diffused surface layers can be treated as two-dimensional structures, but the factors are also useful in obtaining body resistivities on thin samples.
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Cited by
Low dielectric constant materials for microelectronics
Maex, K., Baklanov, M. R., Shamiryan, D., lacopi, F., Brongersma, S. H., & Yanovitskaya, Z. S. (2003) · Journal of Applied Physics · doi:10.1063/1.1567460 · Cited by 1,634
Choi, S., Han, S. I., Jung, D., Hwang, H. J., Lim, C., Bae, S., Park, O. K., Tschabrunn, C. M., Lee, M., Bae, S. Y., et al. (2018) · Nature Nanotechnology · doi:10.1038/s41565-018-0226-8 · Cited by 984
Guex, L. G., Sacchi, B., Peuvot, K. F., Andersson, R. L., Pourrahimi, A. M., Ström, V., Farris, S., & Olsson, R. T. (2017) · Nanoscale · doi:10.1039/c7nr02943h · Cited by 587
Miccoli, I., Edler, F., Pfnür, H., & Tegenkamp, C. (2015) · Journal of Physics: Condensed Matter · doi:10.1088/0953-8984/27/22/223201 · Cited by 559
Superconductivity in single-layer films of FeSe with a transition temperature above 100 K
Ge, J.-F., Liu, Z.-L., Liu, C., Gao, C., Qian, D., Xue, Q., Liu, Y., & Jia, J. (2014) · arXiv (Cornell University) · doi:10.48550/arxiv.1406.3435 · Cited by 549
Metadata
- Authors
- Smits, F. M.
- Venue
- Bell System Technical Journal
- Published
- 1958-05
- Volume
- 37
- Issue
- 3
- Pages
- 711-718
- ISSN
- 0005-8580 (ISSN-L)
- OpenAlex
- W2155727422
- Cited by
- 1,664
- References
- 0
- FWCI
- 5.95
- Type
- journal article
- Language
- en
- Open access
- closed
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- Smits, F. M. (1958). Measurement of Sheet Resistivities with the Four-Point Probe. Bell System Technical Journal. https://doi.org/10.1002/j.1538-7305.1958.tb03883.x
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
