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Fabricating three‐dimensional polymeric photonic structures by multi‐beam interference lithography
Open accessAbstract
The fabrication of true three‐dimensional (3D) microstructures both rapidly and economically over a large area with negligible defects is attractive for a wide range of applications. In particular, multi‐beam interference lithography is one of the promising techniques that can mass‐produce polymeric 3D photonic crystals defect‐free over a large area. This review discusses the relationship between beam geometry and the symmetry of the interference patterns, the lithographic process, and various types of photoresist systems, including thick films of negative‐tone and positive‐tone photoresists, organic‐inorganic hybrids, hydrogels, and holographic polymer‐dispersed liquid crystals. Copyright © 2006 John Wiley & Sons, Ltd.
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Cites
Hydrogels for biomedical applications
Hoffman, A. S. (2002) · Advanced Drug Delivery Reviews · doi:10.1016/s0169-409x(01)00239-3 · Cited by 4,864
Finer features for functional microdevices
Kawata, S., Sun, H.-B., Tanaka, T., & Takada, K. (2001) · Nature · doi:10.1038/35089130 · Cited by 2,871
Direct laser writing of three-dimensional photonic-crystal templates for telecommunications
Deubel, M., von Freymann, G., Wegener, M., Pereira, S., Busch, K., & Soukoulis, C. M. (2004) · Nature Materials · doi:10.1038/nmat1155 · Cited by 1,083
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Patterning surfaces with functional polymers
Nie, Z., & Kumacheva, E. (2008) · Nature Materials · doi:10.1038/nmat2109 · Cited by 935
Recent progress in multiphoton microfabrication
Maruo, S., & Fourkas, J. T. (2008) · Laser & Photonics Reviews · doi:10.1002/lpor.200710039 · Cited by 390
Three-dimensional nanonetworks for giant stretchability in dielectrics and conductors
Park, J., Wang, S., Li, M., Ahn, C., Hyun, J. K., Kim, D. S., Kim, D. K., Rogers, J. A., Huang, Y., & Jeon, S. (2012) · Nature Communications · doi:10.1038/ncomms1929 · Cited by 334
Two-photon polymerization of biocompatible photopolymers for microstructured 3D biointerfaces
Weiß, T., Schade, R., Laube, T., Berg, A., Hildebrand, G., Wyrwa, R., Schnabelrauch, M., & Liefeith, K. (2011) · Advanced Engineering Materials · doi:10.1002/adem.201080090 · Cited by 80
Metadata
- Authors
- Moon, J. H., Ford, J., & Yang, S.
- Venue
- Polymers for Advanced Technologies
- Publisher
- Wiley
- Published
- 2006-02
- Volume
- 17
- Issue
- 2
- Pages
- 83-93
- ISSN
- 1042-7147 (ISSN-L)
- 1099-1581
- OpenAlex
- W2018539304
- Cited by
- 179
- References
- 3
- FWCI
- 7.73
- Type
- journal article
- Language
- en
- Open access
- green
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