The DOI matches its Crossref record; 33 of the 33 references it cites were found in a registry or an index.
A Monte Carlo modeling of electron interaction with solids including cascade secondary electron production
Open accessAbstract
A new Monte Carlo simulation approach has been developed to describe electron scattering and secondary electron generation processes in solids. This approach is based on the uses of Mott's elastic scattering cross section and Penn's dielectric function. A very good agreement has been found on the energy distribution of backscattered electrons between theoretical calculations and accurate experimental measurement recently made by Goto et al. (1994). This fact confirms that the present Monte Carlo model is very useful for more comprehensive understanding of basic phenomena in electron spec‐troscopy and microscopy, particularly in the sub‐keV energy region where cascade secondary electrons play a dominant role. In this paper the details of the Monte Carlo procedure are described and further application to the mechanism of secondary electron generation is presented.
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Tanuma, S., Powell, C. J., & Penn, D. R. (1994) · Surface and Interface Analysis · doi:10.1002/sia.740210302 · Cited by 2,753
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Cited by
Tanuma, Powell, C. J., & Penn, D. R. (2011) · Surface and Interface Analysis · doi:10.1002/sia.3522 · Cited by 914
On secondary electron emission and its semi-empirical description
Tolias, P. (2014) · Plasma Physics and Controlled Fusion · doi:10.1088/0741-3335/56/12/123002 · Cited by 58
Metadata
- Authors
- Ding, Z. ‐., & Shimizu, R.
- Venue
- Scanning
- Publisher
- Wiley
- Published
- 1996-03
- Volume
- 18
- Issue
- 2
- Pages
- 92-113
- ISSN
- 0161-0457 (ISSN-L)
- 1932-8745
- OpenAlex
- W2073202612
- Cited by
- 262
- References
- 33
- FWCI
- 3.34
- Type
- journal article
- Language
- en
- Open access
- bronze
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