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Calculations of electron inelastic mean free paths (IMFPS). IV. Evaluation of calculated IMFPs and of the predictive IMFP formula TPP‐2 for electron energies between 50 and 2000 eV
Abstract
We have made additional evaluations of the electron inelastic mean free paths (IMFPs) and of the predictive IMFP formula TPP‐2 presented in papers II and III of this series. Comparisons have been made with other formulae for the IMFPs and electron attenuation lengths (ALs). We find substantial differences between our IMFP results for 27 elements and 15 inorganic compounds and the AL formulae of Seah and Dench; these differences include different dependences on electron energy and on material parameters. We present IMFP calculations for Al 2 O 3 and GaAs from TPP‐2 in which each parameter of the formula is varied in some physically reasonable range about the true value for each compound; these results show the sensitivity of the computed IMFPs to the choices of parameter values. Finally, we give a summary of sources of uncertainty in the IMFP algorithm, in the experimental optical data from which IMFPs are calculated, and of the TPP‐2 formula. We conclude that TPP‐2 is robust and useful for predicting IMFPs for electron energies and material parameter values in ranges for which the formula was developed and tested.
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Cites
Seah, M. P., & Dench, W. A. (1979) · Surface and Interface Analysis · doi:10.1002/sia.740010103 · Cited by 5,349
Zur Theorie des Durchgangs schneller Korpuskularstrahlen durch Materie
Bethe, H. (1930) · Annalen der Physik · doi:10.1002/andp.19303970303 · Cited by 4,076
Plasma Losses by Fast Electrons in Thin Films
Ritchie, R. H. (1957) · Physical Review · doi:10.1103/physrev.106.874 · Cited by 3,132
Tanuma, S., Powell, C. J., & Penn, D. R. (1994) · Surface and Interface Analysis · doi:10.1002/sia.740210302 · Cited by 2,753
Self-citationElementary excitations in solids
Brown, G. E. (1964) · Nuclear Physics · doi:10.1016/0029-5582(64)90734-5 · Cited by 1,703
Elementary Excitations In Solids
(2018) · CRC Press eBooks · doi:10.1201/9780429500855 · Cited by 1,354
Tanuma, S., Powell, C. J., & Penn, D. R. (1991) · Surface and Interface Analysis · doi:10.1002/sia.740171304 · Cited by 1,205
Self-citationAdvances in Electronics and Electron Physics
(1969) · Electron Probe Microanalysis · doi:10.1016/b978-0-12-014566-9.50001-4 · Cited by 833
Electron mean-free-path calculations using a model dielectric function
Penn, D. R. (1987) · Physical Review B · doi:10.1103/physrevb.35.482 · Cited by 800
Self-citationTanuma, S., Powell, C. J., & Penn, D. R. (1991) · Surface and Interface Analysis · doi:10.1002/sia.740171305 · Cited by 625
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Cited by
Theoretical approaches to x-ray absorption fine structure
Rehr, J. J., & Albers, R. C. (2000) · Reviews of Modern Physics · doi:10.1103/revmodphys.72.621 · Cited by 3,301
Tanuma, S., Powell, C. J., & Penn, D. R. (1994) · Surface and Interface Analysis · doi:10.1002/sia.740210302 · Cited by 2,753
Self-citationTanuma, Powell, C. J., & Penn, D. R. (2011) · Surface and Interface Analysis · doi:10.1002/sia.3522 · Cited by 914
Self-citationLugier, O., Thakur, N., Wu, L., Vockenhuber, M., Ekinci, Y., & Castellanos, S. (2021) · ACS Applied Materials & Interfaces · doi:10.1021/acsami.1c13667 · Cited by 13
Metadata
- Authors
- Tanuma, S., Powell, C. J., & Penn, D. R.
- Venue
- Surface and Interface Analysis
- Publisher
- Wiley
- Published
- 1993-01
- Volume
- 20
- Issue
- 1
- Pages
- 77-89
- ISSN
- 0142-2421 (ISSN-L)
- 1096-9918
- OpenAlex
- W2087840722
- Cited by
- 441
- References
- 16
- FWCI
- 10.18
- Type
- journal article
- Language
- en
- Open access
- closed
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- Tanuma, S., Powell, C. J., & Penn, D. R. (1993). Calculations of electron inelastic mean free paths (IMFPS). IV. Evaluation of calculated IMFPs and of the predictive IMFP formula TPP‐2 for electron energies between 50 and 2000 eV. Surface and Interface Analysis. https://doi.org/10.1002/sia.740200112
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