Cited by 149Advanced MEMS and NEMS TechnologiesMetal and Thin Film MechanicsMicrostructure and mechanical properties

Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip

Sato, Kazuo, Yoshioka, Tetsuo, Ando, Taeko, Shikida, Mitsuhiro, Kawabata, Tatsuo·1998·Sensors and Actuators A: Physical

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Crossref · 10.1016/s0924-4247(98)00125-3

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Authors
Sato, K., Yoshioka, T., Ando, T., Shikida, M., & Kawabata, T.
Affiliations
  • Nagoya University (JP)
  • Omron (Japan) (JP)
Corresponding author
Sato, Kazuo
Venue
Sensors and Actuators A: Physical
Publisher
Elsevier BV
Published
1998-10
Volume
70
Issue
1-2
Pages
148-152
ISSN
0924-4247 (ISSN-L)
OpenAlex
W1975672034
Cited by
149
References
0
Citations by year
2025: 3 · 2024: 5 · 2023: 2 · 2022: 4 · 2021: 4 · 2020: 3 · 2019: 2 · 2018: 8 · 2017: 6 · 2016: 2 · 2015: 5 · 2014: 7 · 2013: 7 · 2012: 4
FWCI
7.32
Type
journal article
Language
en
Open access
closed
Locations
Sensors and Actuators A Physical (publishedVersion)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
  • Physical Sciences › Engineering › Mechanics of Materials › Metal and Thin Film Mechanics
  • Physical Sciences › Materials Science › Materials Chemistry › Microstructure and mechanical properties
Keywords
silicon thin films, uniaxial tensile testing, crystal orientation, elastic modulus, fracture strain, mechanical properties of thin films

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